PBNZT FERROELECTRIC FILM, SOL-GEL SOLUTION, FILM FORMING METHOD AND METHOD FOR PRODUCING FERROELECTRIC FILM
To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO 3 , wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb 2+ as A-site ions and containing Zr 4+ and Ti 4+ as B-site ions, and the A-site contains Bi 3+ as A-site compensation ions and the B-site contains Nb 5+ as B-site compensation ions.
1 . A method for producing a ferroelectric film comprising the steps of:
preparing a sol-gel solution including a raw material solution including: a hydrolysis condensation polymerization of an alkoxide raw material including Pb, Bi, Nb, Zr and Ti and heteropolyacid; and polar solvents and unsaturated fatty acids;
coating said sol-gel solution on a substrate to form a coated film on said substrate;
subjecting said coated film to temporary burning at a temperature of 25 to 450° C. to form a ferroelectric material film on said substrate; and
heat-treating said ferroelectric material film at a temperature of 450 to 800° C. to produce a ferroelectric film including a perovskite-structured ferroelectric substance obtained by crystallizing said ferroelectric material film.
2 . The method for producing a ferroelectric film according to claim 1 , wherein said ferroelectric film is a PBNZT ferroelectric film comprising a perovskite-structured ferroelectric substance represented by (Pb 1-X Bi X )((TiZr) 1-Y Nb Y )O 3 , wherein:
X is 0.05 to 0.1; and
Y is 0.05 to 0.1.
3 . The method for producing a ferroelectric film according to claim 1 , wherein said ferroelectric film has a relative permittivity of 400 or more.
4 . A ferroelectric film being formed by the method for producing a ferroelectric film according to claim 3 and having a relative permittivity of 400 or more.