Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.
1. A high purity liquid composition comprising:
a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and
no more than 0.5 mole % dialkyltin compounds as an impurity relative to the total tin amount,
wherein R is a hydrocarbyl group with 1-31 carbon atoms, and
wherein R′ is a hydrocarbyl group with 1-10 carbon atoms.
2. The composition of claim 1 wherein R is a branched alkyl ligand represented by R 1 R 2 R 3 C—, where R 1 and R 2 are independently an alkyl group with 1-10 carbon atoms, and R 3 is hydrogen or an alkyl group with 1-10 carbon atoms.
3. The composition of claim 1 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 2 (CH 3 ) 2 C—), sec-butyl (CH 3 (CH 3 CH 2 )CH—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.
4. The composition of claim 1 wherein R′ comprises a methyl group, ethyl group, isopropyl group, or t-butyl group.
5. The composition of claim 1 wherein R′ comprises a t-amyl group.
6. The composition of claim 1 comprising essentially no dialkyltin compounds as measured with an approximate 0.1 mole % detection limit.
7. A solution comprising the composition of claim 1 and an organic solvent.
8. The solution of claim 7 having a concentration from about 0.005M to about 0.5M and wherein the solvent comprises an alcohol.
9. The solution of claim 7 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 ) 2 C—), sec-butyl (CH 3 (CH 3 CH 2 )CH—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl, and wherein R′ comprises a methyl group, ethyl group, isopropyl group, t-butyl group, or t-amyl group.
10. A method to selectively form a monoalkyltin trialkoxide compound with low dialkyl tin contamination, the method comprising,
reacting the composition of claim 1 with an alcohol represented by the formula HOR″ in an organic solvent to form RSn(OR″) 3 , wherein R″ is independently a hydrocarbyl group with 1-10 carbon atoms to form a product composition, wherein the product composition has no more than 0.5 mole % dialkyltin compounds as an impurity relative to the total amount of tin.