Transfer apparatus and transfer method
A transfer apparatus of an embodiment includes a substrate installation part on which a substrate provided with an uncured material is installed, a mold presser roller for pressing the mold against the substrate by a movement of the mold presser roller to the substrate installed on the substrate installation part, and a material recovery unit capable of recovering the uncured material protruding from between the substrate and the mold by the movement of the mold pressure.
1. A transfer apparatus, comprising:
a substrate installation part on which a substrate is installed, the substrate being provided with an uncured material curable by irradiation with electromagnetic wave having a predetermined wavelength;
a mold presser roller around which a mold having a predetermined transfer pattern formed thereon is wound, the mold presser roller configured to move to the substrate installed on the substrate installation part for pressing the mold against the substrate; and
a material recovery unit comprising a material recovery block formed with a hole or a slit for sucking the uncured material, the material recovery unit comprising a concave inclined surface extending in a direction of a center axis of the mold presser roller and positioned at a front side of the center axis of the mold presser roller in a moving direction of the mold presser roller, the material recovery unit being configured to suck at least a portion of the uncured material adhering to the mold and protruding from between the substrate and the mold at the front side of the center axis of the mold presser roller in a moving direction of the mold presser roller by the material recovery block to recover the uncured material when pressing the mold against the substrate by moving the mold presser roller, wherein
the material recovery block is configured so that the material recovery block moves corresponding to the movement of the mold presser roller when the mold presser roller moves to press the mold against the substrate installed on the substrate installation part.
2. The transfer apparatus of claim 1 , wherein
the material recovery block is provided so as to be rotatable to the mold presser roller and rotationally positioned at a recovery position for recovering the uncured material and a retreat position apart from the recovery position.
3. The transfer apparatus of claim 2 , further comprising
an auxiliary roller around which the mold is wound, the auxiliary roller configured to avoid interference between the mold and the material recovery block when the material recovery block is located at the retreat position.
4. The transfer apparatus of claim 1 , wherein
the material recovery block is configured so that the material recovery block moves independently of the movement of the mold presser roller corresponding to the movement of the mold presser roller when the mold presser roller moves to press the mold against the substrate.
5. The transfer apparatus of claim 1 , further comprising
an irradiation unit configured to emit the electromagnetic wave, wherein
the irradiation unit is configured to move simultaneously with the movement of the mold presser roller and irradiate the electromagnetic wave on a portion of the substrate where the pressing of the mold against the substrate has been completed for curing the uncured material.
6. The transfer apparatus of claim 1 , wherein at least a portion of the uncured material sucked by the material recovery unit is combined with the uncured material and provided with the substrate.