IP Library Granted Patent US 10,656,007
Granted Patent B2
US 10,656,007 · App. 15/951,118 · Granted May 19, 2020

Asymmetrical ultrasound transducer array

Inventors: Sandeep Akkaraju (Wellesley, MA); Haesung Kwon (Austin, TX); Brian Bircumshaw (Oakland, CA)
Assignee: EXO IMAGING INC.
G01H11/08G01N29/07G01S15/02H01L41/1132H01L41/183B81B3/0021
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Quick Facts
Patent No.
US 10,656,007
App. No.
15/951,118
Granted
May 19, 2020
Kind
B2
Abstract

An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

Claims (29)

1. A transducer array, comprising:

a plurality of micromachined ultrasonic transducers (MUTs) in an asymmetric arrangement,

wherein each MUT of the plurality of MUTs has a dimension along a first direction that is larger than a dimension along a second direction and wherein the plurality of MUTs has a wider bandwidth than an other plurality of MUTs and wherein each MUT of the other plurality of MUTs has a same dimension along the first and second directions.

2. The transducer array of claim 1 , wherein a center to center distance between the plurality of MUTs in one direction is different from a center to center distance between the plurality of MUTs in another direction.

3. The transducer array of claim 1 , wherein the plurality of MUTs has a smaller mutual impedance than a plurality of MUTs in a symmetric arrangement.

4. The transducer array of claim 1 , wherein the plurality of MUTs has one or more additional vibrational modes, compared to a plurality of MUTs in a symmetric arrangement.

5. The transducer array of claim 1 , wherein each MUT of the plurality of MUTs has an elongated shape that supports one or more modes of vibration in a flexural mode of operation.

6. The transducer array as in one of claims 1 - 5 , wherein the plurality of MUTs includes a group of elongated MUTs along an axis and the group of elongated MUTs are combined with a similar group of MUTs offset with each other in one direction.

7. The transducer array as in one of claims 1 - 5 , wherein a projection area of each of the plurality of MUTs has a shape of rectangle, ellipse, or circle.

8. The transducer array as in one of claims 1 - 5 , wherein sidelobe amplitudes of a beam generated by the plurality of MUTs are lower than sidelobe amplitudes of a beam generated by a plurality of MUTs in a symmetric arrangement.

9. The transducer array as in one of claims 1 - 5 , wherein a bandwidth of the plurality of MUTs is wider than a bandwidth of a plurality of MUTs in a symmetric arrangement.

10. The transducer array as in one of claims 1 - 5 , wherein each MUT of the plurality of the MUTs is rotated by a random angle with respect to an axial direction.

11. The transducer array of claim 1 , wherein each of the plurality of MUTs performs at least one of transmitting an ultrasonic wave and receiving an ultrasonic wave.

12. The transducer array of claim 1 , wherein each of the plurality of MUTs operates in at least one of symmetric vibrational mode and asymmetric vibration mode.

13. A transducer array, comprising:

a plurality of micromachined ultrasonic transducers (MUTs) in an asymmetric arrangement,

wherein the plurality of MUTs has a first effective grating angle without encountering grating lobes and wherein a plurality of MUTs in a symmetric arrangement has a second effective grating angle without encountering grating lobes and wherein the first effective grating angle is larger than the second effective grating angle.

14. The transducer array of claim 13 , wherein a dimension of a MUT in one direction is larger than a dimension of the MUT in another direction.

15. The transducer array of claim 13 , wherein a center to center distance between the plurality of MUTs in one direction is different from a center to center distance between the plurality of MUTs in another direction.

16. The transducer array of claim 13 , wherein the plurality of MUTs has a smaller mutual impedance than a plurality of MUTs in a symmetric arrangement.

17. The transducer array of claim 13 , wherein the plurality of MUTs has one or more additional vibrational modes, compared to a plurality of MUTs in a symmetric arrangement.

18. The transducer array of claim 13 , wherein each MUT of the plurality of MUTs has an elongated shape that supports one or more modes of vibration in a flexural mode of operation.

19. The transducer array as in one of claims 14 - 18 , wherein the plurality of MUTs includes a group of elongated MUTs along an axis and the group of elongated MUTs are combined with a similar group of MUTs offset with each other in one direction.

20. The transducer array as in one of claims 14 - 18 , wherein a projection area of each of the plurality of MUTs has a shape of rectangle, ellipse, or circle.

21. The transducer array as in one of claims 14 - 18 , wherein sidelobe amplitudes of a beam generated by the plurality of MUTs are lower than sidelobe amplitudes of a beam generated by a plurality of MUTs in a symmetric arrangement.

22. The transducer array as in one of claims 14 - 18 , wherein a bandwidth of the plurality of MUTs is wider than a bandwidth of a plurality of MUTs in a symmetric arrangement.

23. The transducer array as in one of claims 14 - 18 , wherein each MUT of the plurality of the MUTs is rotated by a random angle with respect to an axial direction.

24. The transducer array of claim 13 , wherein each of the plurality of MUTs performs at least one of transmitting an ultrasonic wave and receiving an ultrasonic wave.

25. The transducer array of claim 13 , wherein each of the plurality of MUTs operates in at least one of symmetric vibrational mode and asymmetric vibration mode.

Assignments (4)
SECURITY INTEREST Recorded Dec 4, 2025
From: EXO IMAGING, INC.
To: WTI FUND X, INC.; WTI FUND XI, INC.
Reel/Frame 073852/0075 →
RELEASE OF SECURITY INTEREST Recorded Jun 21, 2022
From: VENTURE LENDING & LEASING VIII, INC.; VENTURE LENDING & LEASING IX, INC.
To: EXO IMAGING, INC.
Reel/Frame 060266/0358 →
SECURITY INTEREST Recorded Dec 31, 2019
From: EXO IMAGING, INC.
To: VENTURE LENDING & LEASING VIII, INC.; VENTURE LENDING & LEASING IX, INC.
Reel/Frame 051457/0545 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2018
From: AKKARAJU, SANDEEP; KWON, HAESUNG; BIRCUMSHAW, BRIAN
To: EXO IMAGING INC.
Reel/Frame 045512/0074 →
Continuity (1)
Related Publication 20190316957A1 · Oct 17, 2019
Cited By (3)
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