High threshold voltage FET with the same fin height as regular threshold voltage vertical FET
A technique relates to a semiconductor device. A first vertical fin is formed with a first gate stack and a second vertical fin with a second gate stack. The second vertical fin has a hardmask on top. The first vertical fin is adjacent to a first bottom source or drain (S/D) region and the second vertical fin is adjacent to a second bottom S/D region. The first gate stack is reduced to a first gate length and the second gate stack to a second gate length, the second gate length being greater than the first gate length because of the hardmask. The hardmask is removed. A first top S/D region is adjacent to the first vertical fin and a second top S/D region is adjacent to the second vertical fin.
1. A method of forming a semiconductor device, the method comprising:
forming a first vertical fin with a first gate stack and a second vertical fin with a second gate stack, wherein the second vertical fin has a hardmask on top, and wherein the first vertical fin is adjacent to a first bottom source or drain (S/D) region and the second vertical fin is adjacent to a second bottom S/D region;
reducing the first gate stack to a first gate length and the second gate stack to a second gate length, the second gate length being greater than the first gate length because of the hardmask;
removing the hardmask; and
forming a first top S/D region adjacent to the first vertical fin and a second top S/D region adjacent to the second vertical fin.
2. The method of claim 1 further comprising forming a first top spacer on the first gate stack and the second gate stack.
3. The method of claim 1 further comprising doping a first upper portion of the first vertical fin and a second upper portion of the second vertical fin subsequent to forming a first top spacer on the first and second gate stacks.
4. The method of claim 3 , wherein the first top S/D region is epitaxially grown from the first upper portion and the second top S/D region is epitaxially grown from the second upper portion.
5. The method of claim 3 further comprising forming a second top spacer on the first top spacer.
6. The method of claim 5 , wherein the first and second upper portions extend above the first and second top spacers.
7. The method of claim 1 , wherein the first vertical fin and the second vertical fin are substantially a same fin length.
8. The method of claim 1 , wherein the first gate stack and the second gate stack comprise a high-k dielectric material and at least one gate metal.
9. The method of claim 1 further comprising forming a first vertical transistor and a second vertical transistor;
wherein the first vertical transistor includes the first vertical fin and the first gate stack and the second vertical transistor includes the second vertical fin and the second gate stack.
10. The method of claim 9 , wherein the second vertical transistor has a higher threshold voltage than the first vertical transistor defined by the second gate length being greater than the first gate length.
11. The method of claim 9 , wherein the second gate length being greater than the first gate length results in the second vertical transistor having a lower leakage current than the first vertical transistor.