Adjustable extended electrode for edge uniformity control
Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes a first ring having a top surface and a bottom surface, an adjustable tuning ring having a top surface and a bottom surface, and an actuating mechanism. The bottom surface is supported by a substrate support member. The bottom surface at least partially extends beneath a substrate supported by the substrate support member. The adjustable tuning ring is positioned beneath the first ring. The top surface of the adjustable tuning ring and the first ring define an adjustable gap. The actuating mechanism is interfaced with the bottom surface of the adjustable tuning ring. The actuating mechanism is configured to alter the adjustable gap defined between the bottom surface of the first ring and the top surface of the adjustable tuning ring.
1. A method for changing a plasma-sheath boundary curvature at and near the periphery of a substrate in a plasma processing chamber, the method comprising:
forming a plasma above a substrate support having an edge ring and an adjustable tuning ring disposed under the edge ring;
activating a lift mechanism to vertically move the adjustable tuning ring;
adjusting a gap between a top surface of the adjustable tuning ring and a bottom surface of the edge ring by vertically moving the adjustable tuning ring; and
changing the plasma-sheath boundary curvature above the edge ring.
2. The method of claim 1 , wherein changing a plasma profile comprises:
altering a thickness of a plasma sheath formed between the plasma and the edge ring.
3. The method of claim 2 further comprising:
inserting one or more dielectric pads between the tuning ring and the substrate support to create a gap.
4. The method of claim 2 further comprising:
decreasing power coupled from a cathode to the tuning ring by increasing the gap.
5. The method of claim 1 , wherein adjusting a gap between the adjustable tuning ring and the edge ring by vertically moving the adjustable tuning ring further comprises:
moving the adjustable tuning ring between greater than 0 mm and less than or equal to 4 mm vertically.
6. The method of claim 5 , wherein the adjustable tuning ring has a range of motion that does not touch the edge ring.
7. The method of claim 1 , wherein the edge ring is coated with a material selected to limit a chemical reaction between the plasma and the adjustable tuning ring.
8. The method of claim 7 , wherein the material is a yttria oxide.
9. The method of claim 1 , wherein adjusting a gap between the adjustable tuning ring and the edge ring by vertically moving the adjustable tuning ring further comprises:
driving a lift pin through the substrate support with a lift mechanism to move the adjustable tuning.
10. The method of claim 1 , wherein adjusting a gap between the adjustable tuning ring and the edge ring by vertically moving the adjustable tuning ring further comprises:
accessing an orifice formed in a cavity formed in the bottom of the adjustable tuning ring; and
turning a screw disposed in the cavity, the screw configured to raise or lower the tuning ring.