Metallization of solar cells
Approaches for the metallization of solar cells and the resulting solar cells are described. In an example, a method of fabricating a solar cell involves forming a plurality of alternating N-type and P-type regions in or above a substrate. The method also involves forming a metal seed layer on the plurality of alternating N-type and P-type regions. The method also involves patterning at least a portion of the metal seed layer at regions in alignment with locations between the alternating N-type and P-type regions. The method also involves, subsequent to the patterning, etching to form trenches at the locations between the alternating N-type and P-type regions, isolating the alternating N-type and P-type regions from one another.
1. A solar cell, comprising:
a substrate;
a semiconductor emitter region disposed in or above the substrate; and
a contact structure electrically connected to the semiconductor emitter region and comprising:
a metal seed material disposed on and covering an uppermost surface of the semiconductor emitter region;
an insulating resist material disposed on the metal seed material, the insulating resist material having an opening formed therein exposing a portion of the metal seed material; and
a metal structure disposed in the opening of the insulating resist material and in contact with the metal seed material, wherein a portion of the metal structure extends laterally over the insulating resist material.
2. The solar cell of claim 1 , wherein the substrate is an N-type monocrystalline silicon substrate, wherein the semiconductor emitter region is an N-type or P-type polycrystalline silicon emitter region formed above the substrate, wherein the metal seed material comprises at least a first portion comprising aluminum in an amount greater than approximately 97% and silicon in an amount approximately in the range of 1-2%, and a second portion disposed above the first portion and comprising titanium and tungsten (TiW) or comprising nickel, and wherein the metal structure comprises copper.
3. The solar cell of claim 1 , wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
4. The solar cell of claim 1 , wherein the semiconductor emitter region is in a polycrystalline silicon layer above the substrate.
5. The solar cell of claim 1 , further comprising:
a passivation layer between the metal structure and the insulating resist material.
6. A solar cell, comprising:
a substrate;
a semiconductor emitter region disposed in a polycrystalline silicon layer on a thin dielectric layer on the substrate; and
a contact structure electrically connected to the semiconductor emitter region and comprising:
a metal seed material disposed on and covering an uppermost surface of the semiconductor emitter region;
an insulating resist material disposed on the metal seed material, the insulating resist material having an opening formed therein exposing a portion of the metal seed material; and
a metal structure disposed in the opening of the insulating resist material and in contact with the metal seed material, wherein a portion of the metal structure extends laterally over the insulating resist material.
7. The solar cell of claim 6 , wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
8. The solar cell of claim 6 , further comprising:
a passivation layer between the metal structure and the insulating resist material.
9. A solar cell, comprising:
a substrate;
a semiconductor emitter region disposed in the substrate; and
a contact structure electrically connected to the semiconductor emitter region and comprising:
a metal seed material disposed on and covering an uppermost surface of the semiconductor emitter region;
an insulating resist material disposed on the metal seed material, the insulating resist material having an opening formed therein exposing a portion of the metal seed material; and
a metal structure disposed in the opening of the insulating resist material and in contact with the metal seed material, wherein a portion of the metal structure extends laterally over the insulating resist material.
10. The solar cell of claim 9 , wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
11. The solar cell of claim 9 , further comprising:
a passivation layer between the metal structure and the insulating resist material.
12. The solar cell of claim 1 , further comprising:
a passivation layer between the metal structure and the insulating resist material, wherein the substrate is an N-type monocrystalline silicon substrate, wherein the semiconductor emitter region is an N-type or P-type polycrystalline silicon emitter region formed above the substrate, wherein the metal seed material comprises at least a first portion comprising aluminum in an amount greater than approximately 97% and silicon in an amount approximately in the range of 1-2%, and a second portion disposed above the first portion and comprising titanium and tungsten (TiW) or comprising nickel, and wherein the metal structure comprises copper.
13. The solar cell of claim 1 , further comprising:
a passivation layer between the metal structure and the insulating resist material, wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
14. The solar cell of claim 1 , further comprising:
a passivation layer between the metal structure and the insulating resist material, wherein the semiconductor emitter region is in a polycrystalline silicon layer above the substrate.
15. The solar cell of claim 1 , wherein the substrate is an N-type monocrystalline silicon substrate, wherein the semiconductor emitter region is an N-type or P-type polycrystalline silicon emitter region formed above the substrate, wherein the metal seed material comprises at least a first portion comprising aluminum in an amount greater than approximately 97% and silicon in an amount approximately in the range of 1-2%, and a second portion disposed above the first portion and comprising titanium and tungsten (TiW) or comprising nickel, and wherein the metal structure comprises copper, and wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
16. The solar cell of claim 1 , wherein the substrate is an N-type monocrystalline silicon substrate, wherein the semiconductor emitter region is an N-type or P-type polycrystalline silicon emitter region formed above the substrate, wherein the metal seed material comprises at least a first portion comprising aluminum in an amount greater than approximately 97% and silicon in an amount approximately in the range of 1-2%, and a second portion disposed above the first portion and comprising titanium and tungsten (TiW) or comprising nickel, and wherein the metal structure comprises copper, and wherein the semiconductor emitter region is in a polycrystalline silicon layer above the substrate.
17. The solar cell of claim 1 , wherein the substrate is an N-type monocrystalline silicon substrate, wherein the semiconductor emitter region is an N-type or P-type polycrystalline silicon emitter region formed above the substrate, wherein the metal seed material comprises at least a first portion comprising aluminum in an amount greater than approximately 97% and silicon in an amount approximately in the range of 1-2%, and a second portion disposed above the first portion and comprising titanium and tungsten (TiW) or comprising nickel, and wherein the metal structure comprises copper, wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material, and wherein the semiconductor emitter region is in a polycrystalline silicon layer above the substrate.
18. The solar cell of claim 1 , wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material, and wherein the semiconductor emitter region is in a polycrystalline silicon layer above the substrate.
19. The solar cell of claim 6 , further comprising:
a passivation layer between the metal structure and the insulating resist material, wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.
20. The solar cell of claim 9 , further comprising:
a passivation layer between the metal structure and the insulating resist material, wherein an edge of the metal structure is in vertical alignment with an edge of the metal seed material.