IP Library Granted Patent US 10,319,442
Granted Patent B2
US 10,319,442 · App. 15/955,884 · Granted Jun 11, 2019

Parallel-connected merged-floating-gate nFET-pFET EEPROM cell and array

Inventors: Tak Ning (Yorktown Heights, NY); Jeng-Bang Yau (Yorktown Heights, NY)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
G11C16/045H01L27/11521H01L27/11526
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Quick Facts
Patent No.
US 10,319,442
App. No.
15/955,884
Granted
Jun 11, 2019
Kind
B2
Abstract

A shared floating gate device, the device including an nFET, a pFET including a different material than that of the nFET, and a floating gate.

Claims (52)

1. A shared floating gate device, the device comprising:

an nFET;

a pFET comprising a different material than that of the nFET; and

a floating gate.

2. The device of claim 1 , wherein the nFET and the pFET share the floating gate to form an electrically erasable and programmable non-volatile memory device.

3. The device of claim 1 , wherein the nFET includes an nFET gate dielectric,

wherein the pFET includes a pFET gate dielectric, and

wherein the pFET gate dielectric comprises different materials.

4. The device of claim 3 , wherein the different materials are selected so that a difference of energy barriers for a hot-carrier injection formed by the nFET gate dielectric and the pFET gate dielectric is 1 eV or less.

5. The device of claim 1 , wherein the nFET comprises one of:

Y 2 O 3 ;

ZrO 2 ; and

HfO 2 .

6. The device of claim 1 , wherein the pFET comprises one of:

Si 3 N 4 ;

Y 2 O 3 ;

ZrO 2 ; and

HfO 2 .

7. An electrically erasable programmable read-only memory (EEPROM) cell, the cell comprising:

an nFET including a source;

a pFET including a drain and comprising a different material than that of the nFET;

a floating gate; and

an nFET access transistor including a drain connected to the source of the nFET and the drain of the pFET.

8. The cell of claim 7 , wherein the nFET and the pFET share the floating gate to form an electrically programmable and erasable non-volatile memory device.

9. The cell of claim 7 , wherein the nFET includes an nFET gate dielectric,

wherein the pFET includes a pFET gate dielectric, and

wherein the pFET gate dielectric comprises different materials.

10. The cell of claim 9 , wherein the different materials are selected so that a difference of energy barriers for a hot-carrier injection formed by the nFET gate dielectric and pFET gate dielectric is 1 eV or less.

11. The cell of claim 7 , wherein the nFET comprises one of:

Y 2 O 3 ;

ZrO 2 ; and

HfO 2 .

12. The cell of claim 7 , wherein the pFET comprises one of:

Si 3 N 4 ;

Y 2 O 3 ;

ZrO 2 ; and

HfO 2 .

13. An array structure, comprising:

a plurality of cells, each cell including:

an nFET including a source;

a pFET including a drain and comprising a different material than that of the nFET;

a floating gate; and

an nFET access transistor including a drain connected to the source of the nFET and the drain of the pFET.

14. The array structure of claim 13 , further comprising one nFET access transistor per word-line.

15. The array structure of claim 13 , further comprising one bit-line per pFET access transistor.

16. The array structure of claim 13 , further comprising word-line and two bit-lines per each cell, said word-line being connected to the gate of the access transistor, one of said bit-lines being connected to the source of the pFET and the other one of said bit-lines being connected to the drain of nFET.

17. The array structure of claim 13 , further comprising peripheral logic circuits,

wherein the plurality of cells and the peripheral logic circuits are built on a same substrate.

18. The array structure of claim 13 , further comprising peripheral logic circuits,

wherein the plurality of cells is built on a polycrystalline silicon film-on-insulator and the peripheral logic circuits are built on a bulk silicon substrate.

19. The array structure of claim 13 , further comprising peripheral logic circuits,

wherein the plurality of cells and the peripheral logic circuits are built on a same bulk silicon substrate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 18, 2018
From: NING, TAK; YAU, JENG-BANG
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 045573/0395 →
Continuity (2)
Continuation 15798448 · Oct 31, 2017
Related Publication 20190130975A1 · May 2, 2019