High-Q integrated inductor and method thereof
A device having a substrate, a dielectric slab attached upon the substrate, a coil including a plurality of metal segments laid out on a first metal layer secured by the dielectric slab, the coil being substantially laterally symmetrical with respect to a central line from a top view perspective, and a shield laid out on a second metal layer secured by the dielectric slab and configured in a tree topology. The shield is substantially laterally symmetrical with respect to the central line from the top view perspective, the tree topology including a plurality of clusters of branches, wherein each of said plurality of clusters of branches is associated with a respective metal segment of the coil and includes a primary branch and at least one set of secondary branches that are branched from the primary branch, parallel to one another, and oriented at a substantially forty-five-degree angle with respect to the respective metal segment from the top view perspective.
1. A device comprises:
a substrate;
a dielectric slab attached upon the substrate;
a coil including a plurality of metal segments substantially forming a loop laid out on a first metal layer secured by the dielectric slab, the coil being substantially laterally symmetrical with respect to a central line from a top view perspective; and
a shield laid out on a second metal layer secured by the dielectric slab and configured in a tree topology, the shield being substantially laterally symmetrical with respect to the central line from the top view perspective, the tree topology including a plurality of clusters of branches, wherein each of said plurality of clusters of branches is associated with a respective metal segment of the coil and includes a primary branch and at least one set of secondary branches that are branched from the primary branch, parallel to one another, and oriented at a substantially forty-five-degree angle with respect to the respective metal segment from the top view perspective, wherein the plurality of primary branches emanate out from a center point and secondary branches extend from the primary branches only in locations where the secondary branches overlap with the coil, such that a distance exists along each primary branch, closest to the center point, along which no secondary branch extends.
2. The device of claim 1 , wherein all primary branches emanate from a center point located at the central line.
3. The device of claim 1 , wherein at least one cluster of said plurality of clusters of branches include two sets of secondary branches.
4. The device of claim 3 , wherein the two sets of secondary branches are substantially balanced with respect to the primary branch therein.
5. The device of claim 1 , wherein the primary branch and all secondary branches of any cluster of said plurality of clusters of branches are open-ended metal lines that are substantially narrower than the associated respective metal segment.
6. A device comprises:
a substrate;
a dielectric slab attached upon the substrate;
a coil including a plurality of metal segments substantially forming a loop laid out on a first metal layer secured by the dielectric slab, the coil being substantially laterally symmetrical with respect to a central line from a top view perspective; and
a shield laid out on a second metal layer secured by the dielectric slab and configured in a tree topology, the shield being substantially laterally symmetrical with respect to the central line from the top view perspective, the tree topology including a plurality of clusters of branches, wherein each of said plurality of clusters of branches is associated with a respective metal segment of the coil and includes a primary branch and at least one set of secondary branches that are branched from the primary branch, parallel to one another, and oriented at a substantially forty-five-degree angle with respect to the respective metal segment from the top view perspective, wherein each of the secondary branches at least partially overlaps with the coil, and wherein in each cluster the primary branch emanates out from a center point and the secondary branches of extend from the primary branch only in locations where the secondary branches overlap with the coil, such that a distance exists along each primary branch, closest to the center point, along which no secondary branch extends.