IP Library Granted Patent US 10,811,336
Granted Patent B2
US 10,811,336 · App. 15/966,577 · Granted Oct 20, 2020

Temperature management of electronic circuitry of electronic devices, memory devices, and computing devices

Inventors: Ravi Pillarisetty (Portland, OR); Abhishek A. Sharma (Hillsboro, OR); Elijah V. Karpov (Portland, OR); Prashant Majhi (San Jose, CA); Brian S. Doyle (Portland, OR)
Assignee: Intel Corporation
H01L23/38H01L23/34H01L27/16H01L27/222H01L27/2463H01L35/16H01L35/18H01L35/30H01L43/02H01L45/1286
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Quick Facts
Patent No.
US 10,811,336
App. No.
15/966,577
Granted
Oct 20, 2020
Kind
B2
Abstract

Electronic devices, memory devices, and computing devices are disclosed. An electronic device includes electronic circuitry, a temperature sensor, a heat sink, at least one thermoelectric material, a thermally conductive material configured to thermally couple the electronic circuitry to the at least one thermoelectric material, and a transistor. The temperature sensor is configured to monitor a temperature of the electronic circuitry. The transistor is configured to selectively enable thermoelectric current to flow through the at least one thermoelectric material and dissipate heat from the thermally conductive material to the heat sink responsive to fluctuations in the temperature of the electronic circuitry detected by the temperature sensor.

Claims (21)

1. An electronic device, comprising:

a device layer on or in a substrate;

an interlayer dielectric (ILD) on the device layer;

electronic circuitry within the interlayer dielectric (ILD);

a temperature sensor having at least a portion thereof located within the ILD, the temperature sensor configured to monitor a temperature of the electronic circuitry;

a heat sink;

a thermoelectric material thermally coupled to the heat sink, the thermoelectric material within the interlayer dielectric (ILD), and the thermoelectric material having a first portion over the electronic circuitry and a second portion beneath the electronic circuitry;

a thermally conductive material configured to thermally couple the electronic circuitry to the thermoelectric material; and

a transistor configured to selectively enable thermoelectric current to flow through the thermoelectric material and dissipate heat from the thermally conductive material to the heat sink responsive to fluctuations in the temperature of the electronic circuitry detected by the temperature sensor.

2. The electronic device of claim 1 , further comprising control circuitry operably coupled to the temperature sensor and the transistor, the control circuitry configured to monitor an output from the temperature sensor and trigger the transistor to enable the thermoelectric current to flow responsive to an excess in the temperature above a predetermined threshold level.

3. The electronic device of claim 1 , wherein the electronic circuitry includes an array of memory cells.

4. The electronic device of claim 3 , wherein the array of memory cells includes an array of embedded non-volatile memory (e-NVM) cells.

5. The electronic device of claim 3 , wherein the array of memory cells includes an array of one selector, one resistor (1S-1R) memory cells.

6. The electronic device of claim 3 , wherein the array of memory cells comprises at least one of a resistive read only memory (RRAM) cell, a spin transfer torque memory (STTM) cell, or a magnetoresistive random access memory (MRAM) cell.

7. The electronic device of claim 1 , wherein at least a portion of the electronic circuitry is located within the ILD with a portion of the ILD between the at least a portion of the electronic circuitry and the device layer.

8. The electronic device of claim 7 , wherein:

the electronic circuitry includes an array of memory cells; and

the device layer includes memory control circuitry configured to at least partially control access to the array of memory cells.

9. The electronic device of claim 1 , wherein the thermally conductive material comprises aluminum nitride (AlN).

10. The electronic device of claim 1 , wherein the one thermoelectric material comprises a p-type thermoelectric material at a first side of the thermally conductive material and an n-type thermoelectric material on a second side of the thermally conductive material opposite the first side.

11. The electronic device of claim 1 , wherein the thermoelectric material comprises material selected from the group consisting of lead telluride (PbTe), lead telluride (1960) (PbTe 1960), lead selenide telluride (PbSeTe), antimony telluride (Sb2Te3), tellurium-antimony-germanium-silver (Te/Sb/Ge/Ag) (TAGS), a filled skutterudite (CeFe4Sb12), a zintl compound (Yb14MnSb11), silicon germanium (SiGe), bismuth telluride (Bi2Te3), a skutterudite (CoSb3), and lanthanum telluride (La3Te4).

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 18, 2025
From: INTEL CORPORATION
To: SK HYNIX NAND PRODUCT SOLUTIONS CORP. (DBA SOLIDIGM)
Reel/Frame 072890/0093 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 27, 2018
From: PILLARISETTY, RAVI; SHARMA, ABHISHEK A.; KARPOV, ELIJAH V.; MAJHI, PRASHANT; DOYLE, BRIAN S.
To: INTEL CORPORATION
Reel/Frame 046993/0679 →
Continuity (1)
Related Publication 20190333839A1 · Oct 31, 2019
Cited By (1)
US 12,363,820