IP Library Granted Patent US 10,654,141
Granted Patent B2
US 10,654,141 · App. 15/966,615 · Granted May 19, 2020

Multi-axis machine tool and methods of controlling the same

Inventors: Guang Lu (Lake Oswego, OR); Mehmet E. Alpay (Portland, OR); Mike Tyler (Hillsboro, OR); Qian Xu (Portland, OR); Jan Kleinert (Wilsonville, OR); Zhibin Lin (Portland, OR); James D. Brookhyser (Portland, OR); Ho Wai Lo (Portland, OR); Kurt M. Eaton (West Linn, OR)
Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC
B23Q15/14G05B19/19G05B19/402G05B2219/34015G05B2219/41196G05B2219/41217G05B2219/41427G05B2219/50218
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Quick Facts
Patent No.
US 10,654,141
App. No.
15/966,615
Granted
May 19, 2020
Kind
B2
Abstract

One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

Claims (47)

1. A method for controlling a multi-axis machine tool configured to process a workpiece using a tool, the multi-axis machine tool comprising a rotary actuator configured to impart relative movement between the tool and the workpiece about a first axis, a first linear actuator configured to impart relative movement between the tool and the workpiece along a second axis, a second linear actuator configured to impart relative movement between the tool and the workpiece along a third axis, and a controller operatively coupled to the rotary actuator, the first linear actuator and the second linear actuator, the method comprising:

receiving, at the controller, a preliminary rotary actuator command, the preliminary rotary actuator command having frequency content exceeding a bandwidth of the rotary actuator; and

at the controller:

generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within the bandwidth of the rotary actuator;

generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command;

outputting the processed rotary actuator command to the rotary actuator;

outputting the first linear actuator command to the first linear actuator; and

outputting the second linear actuator command to the second linear actuator.

2. The method of claim 1 , wherein the second axis is orthogonal to the first axis.

3. The method of claim 1 , wherein the third axis is orthogonal to the second axis.

4. The method of claim 1 , wherein generating the processed rotary actuator command comprises filtering the preliminary rotary actuator command.

5. The method of claim 1 , wherein generating the first linear actuator command and the second linear actuator command comprises:

generating a set of intermediate linear actuator commands based on the preliminary rotary actuator command and at least one preliminary linear actuator command; and

processing the set of intermediate linear actuator commands based, at least in part, on the processed rotary actuator command.

6. The method of claim 1 , further comprising processing the workpiece with the tool while imparting relative movement about the first axis.

7. The method of claim 6 , wherein processing the workpiece with the tool comprises directing laser light to the workpiece.

8. A multi-axis machine tool, comprising:

a tool configured to process a workpiece;

a first rotary actuator configured to impart relative movement between the tool and the workpiece about a first axis;

a first linear actuator configured to impart relative movement between the tool and the workpiece along a second axis;

a second linear actuator configured to impart relative movement between the tool and the workpiece along a third axis; and

a controller operatively coupled to the first rotary actuator, the first linear actuator and the second linear actuator, the controller configured to:

receive a preliminary rotary actuator command, the preliminary rotary actuator command having frequency content exceeding a bandwidth of the rotary actuator;

generate a processed rotary actuator command based, at least in part, on the received preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator;

generate a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command;

output the processed rotary actuator command to the rotary actuator;

output the first linear actuator command to the first linear actuator; and

output the second linear actuator command to the second linear actuator.

9. The multi-axis machine tool of claim 8 , further comprising a second rotary actuator configured to impart relative movement between the tool and the workpiece about the first axis, wherein a bandwidth of the second rotary actuator is higher than a bandwidth of the first rotary actuator.

10. The multi-axis machine tool of claim 8 , further comprising a third linear actuator configured to impart relative movement between the tool and the workpiece along at least one selected from the group consisting of the first axis, the second axis and the third axis.

11. The multi-axis machine tool of claim 8 , wherein the tool includes a waterjet.

12. The multi-axis machine tool of claim 8 , further comprising a laser source and the tool includes a focused beam of laser light.

13. The multi-axis machine tool of claim 12 , further comprising a third linear actuator configured to impart relative movement between the tool and the workpiece along at least one selected from the group consisting of the first axis and the second axis.

14. The multi-axis machine tool of claim 12 , further comprising a third linear actuator configured to impart relative movement between a beam waist of the focused beam of laser light and the workpiece along a propagation path in which the beam of laser light propagates.

15. The multi-axis machine tool of claim 14 , wherein the third linear actuator includes at least one selected from the group consisting of an acousto-optic deflector (AOD) system, a microelectromechanical systems (MEMS) mirror system and an adaptive optical (AO) system.

16. A multi-axis machine tool, comprising:

a laser source configured to generate a beam of laser light;

a tool tip positioning assembly including a scan lens configured to focus the beam of laser light thereby producing a focused beam of laser light having a beam waist, wherein the tool tip positioning assembly further includes at least one actuator to move the scan lens along at least one axis and at least one positioner arranged between the laser source and the scan lens, wherein the at least one positioner is operative to move the beam waist along at least one axis, wherein the tool tip positioning assembly includes at least one selected from the group consisting of an acousto-optic deflector (AOD) system, a microelectromechanical systems (MEMS) mirror system and an adaptive optical (AO) system;

a workpiece positioning assembly configured to position the workpiece in a path along which the focused beam of laser light is propagatable, wherein the workpiece positioning assembly is further operative to rotate the workpiece about at least one axis and translate the workpiece along at least one axis; and

a controller operatively coupled to the laser source, the workpiece positioning assembly, and the tool tip positioning assembly and configured to control an operation of the laser source, the workpiece positioning assembly, and the tool tip positioning assembly.

17. The multi-axis machine tool of claim 16 , wherein the at least one positioner is operative to translate the beam waist along at least one axis.

18. The multi-axis machine tool of claim 16 , wherein the at least one positioner is operative to rotate the beam waist about at least one axis.

19. The multi-axis machine tool of claim 1 , wherein the at least one positioner includes an AOD system.

20. The multi-axis machine tool of claim 19 , wherein the AOD system includes:

a first AOD system operative to diffract the beam of laser light along a first axis; and

a second AOD system operative to diffract the beam of laser light along a second axis orthogonal to the first axis.

21. The multi-axis machine tool of claim 20 , wherein the AOD system includes a relay lens disposed optically downstream of the second AOD system and operative to transform a deflection angle of the path into a laterally-displaced path.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →