IP Library Granted Patent US 10,665,525
Granted Patent B2
US 10,665,525 · App. 15/968,353 · Granted May 26, 2020

Heat transfer for power modules

Inventors: Jerome Teysseyre (Scottsdale, AZ); Roveendra Paul (Fremont, CA); Dukyong Lee (Cheon-an, KR)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L23/3675H01L23/3735H01L23/4006H01L2023/405H01L2023/4031H01L2023/4056H01L2023/4087
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Quick Facts
Patent No.
US 10,665,525
App. No.
15/968,353
Granted
May 26, 2020
Kind
B2
Abstract

In one general aspect, an apparatus can include a module including a semiconductor die. The apparatus can include a heatsink coupled to the module and including a substrate, and a plurality of protrusions. The apparatus can include a cover including a channel where the plurality of protrusions of the heatsink are disposed within the channel, and can include a sealing mechanism disposed between the cover and the module.

Claims (49)

1. An apparatus, comprising:

a module including a semiconductor die;

a heatsink coupled to the module and including:

a substrate, and

a plurality of protrusions;

a first cover defining a first channel, the plurality of protrusions of the heatsink being disposed within the first channel defined by the first cover;

a second cover defining a second channel,

the first cover being coupled to the module and in contact with the module via a sealing mechanism disposed between the first cover and the module, the module separating the first channel from the second channel.

2. The apparatus of claim 1 , wherein the first cover includes an inlet opening and an outlet opening in fluid communication with the inlet opening via the first channel.

3. The apparatus of claim 1 , wherein the heatsink is a first heatsink, the first cover and the first heatsink are on a first side of the module,

the apparatus, further comprising:

a second heatsink coupled to a second side of the module,

the second heatsink being disposed within the second channel.

4. The apparatus of claim 3 , wherein the first cover is coupled to the second cover via a coupling mechanism disposed lateral to the module.

5. The apparatus of claim 1 , wherein the module is a first module, the heatsink is a first heatsink,

the apparatus further comprising:

a second module;

a second heatsink coupled to the second module, the second heatsink having a plurality of protrusions within the first channel, the first heatsink and the second heatsink being aligned along the first channel.

6. The apparatus of claim 1 , wherein the plurality of protrusions including at least one protrusion having an end separated from an inner surface of the first channel by a gap.

7. The apparatus of claim 1 , wherein the sealing mechanism is in contact with the substrate of the heatsink.

8. The apparatus of claim 1 , further comprising:

a coupling mechanism coupling the first cover to the substrate of the heatsink.

9. The apparatus of claim 1 , wherein the sealing mechanism is in contact with at least a portion of the module.

10. The apparatus of claim 1 , wherein the sealing mechanism includes an o-ring disposed within a groove included in the first cover.

11. The apparatus of claim 1 , wherein the module is aligned along a first plane, the sealing mechanism is aligned along a second plane, the sealing mechanism is disposed along a perimeter of the module.

12. The apparatus of claim 1 , wherein the heatsink includes a first metal and a second metal.

13. The apparatus of claim 1 , wherein the module is a dual-sided module including a direct bonded metal substrate.

14. The apparatus of claim 1 , wherein the module includes a direct bonded metal substrate in contact with the semiconductor die, the direct bonded metal substrate includes a dielectric layer disposed between a pair of metal layers.

15. An apparatus, comprising:

a module including a semiconductor die;

a first cover including:

a first channel defined by the first cover, and

a plurality of protrusions extending from an inner surface of the first cover into the first channel;

a second cover including a second channel,

the first cover being coupled to the module and in contact with the module via a sealing mechanism disposed between the first cover and the module, the module separating the first channel from the second channel.

16. The apparatus of claim 15 , wherein an end of at least one of the plurality of protrusions is separated from a surface of the module by a gap.

17. The apparatus of claim 15 , wherein the first cover includes an inlet opening and an outlet opening in fluid communication with the inlet opening via the first channel.

18. The apparatus of claim 15 , wherein the first cover includes an inlet opening and an outlet opening in fluid communication with the inlet opening via the first channel, the module is a first module,

the apparatus, further comprising:

a second module, the first module and the second module being aligned along the first channel between the inlet opening and the outlet opening.

19. A method comprising:

forming a module including:

a semiconductor die encapsulated in a molding material, and

a direct bonded metal substrate having an inner surface electrically coupled to the semiconductor die; and

coupling a first cover to at least a first portion of the module and a second cover to at least a second portion of the module such that:

a heat-transfer mechanism is disposed within a first channel defined by the first cover between a wall of the first cover and the module, and

the module separates the first channel from a second channel defined by the second cover.

20. The method of claim 19 , wherein the heat-transfer mechanism is a heatsink coupled to the first cover or the module before the first cover is coupled around the module.

21. The method of claim 19 , wherein the heat-transfer mechanism includes a cover protrusion extending from the first cover.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 047864, FRAME 0611 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064077/0298 →
PATENT SECURITY AGREEMENT Recorded Oct 16, 2018
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 047864/0611 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2018
From: TEYSSEYRE, JEROME; PAUL, ROVEENDRA; LEE, DUKYONG
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 045904/0370 →
Cited By (4)
US 12,513,867 US 12,526,966 US 12,696,430 US 12,713,917