IP Library Granted Patent US 11,004,808
Granted Patent B2
US 11,004,808 · App. 15/973,276 · Granted May 11, 2021

Package with different types of semiconductor dies attached to a flange

Inventors: Xikun Zhang (Shanghai, CN); Dejiang Chang (Shanghai, CN); Bill Agar (Morgan Hill, CA); Michael Lefevre (Morgan Hill, CA); Alexander Komposch (Morgan Hill, CA)
Assignee: CREE, INC.
H01L23/66H01L23/49503H01L23/49568H01L23/49575H01L23/49844H01L24/27H01L24/32H01L24/83H01L24/95H01L25/072H01L25/50H01L29/16H01L23/49534H01L23/49537H01L23/49582H01L23/49586H01L24/29H01L24/48H01L24/49H01L24/73H01L24/92H01L2223/6644H01L2223/6672H01L2224/2919H01L2224/29101H01L2224/29111H01L2224/29139H01L2224/29144H01L2224/29147H01L2224/32245H01L2224/45014H01L2224/48091H01L2224/48247H01L2224/49111H01L2224/49175H01L2224/73265H01L2224/8384H01L2224/83121H01L2224/83136H01L2224/83192H01L2224/83801H01L2224/83815H01L2224/83855H01L2224/92247H01L2924/00014H01L2924/014H01L2924/01029H01L2924/01047H01L2924/01079H01L2924/1033H01L2924/10253H01L2924/10329H01L2924/13091H01L2924/19041
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Quick Facts
Patent No.
US 11,004,808
App. No.
15/973,276
Granted
May 11, 2021
Kind
B2
Abstract

A multi-die package includes a thermally conductive flange, a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material, a second semiconductor die attached to the same thermally conductive flange as the first semiconductor die via a second die attach material, and leads attached to the thermally conductive flange or to an insulating member secured to the flange. The leads are configured to provide external electrical access to the first and second semiconductor dies. The second semiconductor die is made of a second semiconductor material different than the first semiconductor material. Additional multi-die package embodiments are described.

Claims (84)

1. A multi-die package, comprising:

a thermally conductive flange;

a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material;

a second semiconductor die attached to the same thermally conductive flange as the first semiconductor die via a second die attach material; and

leads attached to the thermally conductive flange or to an insulating member secured to the thermally conductive flange, wherein the leads are configured to provide external electrical access to the first and second semiconductor dies,

wherein the second semiconductor die is made of a second semiconductor material different than the first semiconductor material,

wherein the first die attach material attaches a back side of the first semiconductor die to a top side of the thermally conductive flange, and

wherein the second die attach material attaches a back side of the second semiconductor die to the top side of the thermally conductive flange.

2. The multi-die package of claim 1 ,

wherein the first semiconductor die is made of GaN and the second semiconductor die is made of Si, and

wherein the first die attach material comprises a different material than the second die attach material.

3. The multi-die package of claim 2 ,

wherein the first semiconductor die is a main amplifier of a Doherty amplifier circuit and the second semiconductor die is a peaking amplifier of the Doherty amplifier circuit, and

wherein the first die attach material is configured to hold the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange.

4. The multi-die package of claim 1 ,

wherein the first semiconductor die is a power transistor die and the second semiconductor die is a power transistor die,

wherein the first die attach material has a first die attach temperature range, and

wherein the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

5. The multi-die package of claim 1 ,

wherein a plurality of semiconductor dies made of the first semiconductor material are attached to the thermally conductive flange via the first die attach material, and

wherein a plurality of semiconductor dies made of the second semiconductor material are attached to the thermally conductive flange via the second die attach material.

6. The multi-die package of claim 5 ,

wherein some of the semiconductor dies made of the first semiconductor material are power transistor dies, and

wherein other ones of the semiconductor dies made of the first semiconductor material are passive capacitor dies, and

wherein the first die attach material comprises a different material than the second die attach material.

7. The multi-die package of claim 1 ,

wherein the first semiconductor die is a GaN power amplifier die and the second semiconductor die is an LDMOS power amplifier die,

wherein the first die attach material has a first die attach temperature range, and

wherein the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

8. The multi-die package of claim 7 , wherein the GaN power amplifier die is on a SiC substrate.

9. The multi-die package of claim 7 , wherein the GaN power amplifier die is on a Si substrate.

10. The multi-die package of claim 1 ,

wherein the first die attach material comprises a different material than the second die attach material, and

wherein the first die attach material is configured to hold the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange.

11. The multi-die package of claim 1 , wherein the first die attach material is configured to fixedly attach the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange,

wherein the first die attach material directly attaches the first semiconductor die to the thermally conductive flange, and

wherein the second die attach material directly attaches the second semiconductor die to the thermally conductive flange.

12. The multi-die package of claim 1 ,

wherein the first die attach material comprises a different material than the second die attach material; and

wherein the first semiconductor die is made of GaN and the second semiconductor die is made of Si.

13. A multi-die package, comprising:

a thermally conductive flange;

a first semiconductor die made of a first semiconductor material attached to the thermally conductive flange via a first die attach material;

a second semiconductor die attached to the same thermally conductive flange as the first semiconductor die via a second die attach material; and

leads attached to the thermally conductive flange or to an insulating member secured to the thermally conductive flange, wherein the leads are configured to provide external electrical access to the first and second semiconductor dies,

wherein the second semiconductor die is made of a second semiconductor material different than the first semiconductor material,

wherein the first die attach material has a first die attach temperature range,

wherein the second die attach material has a second die attach temperature range which is different than the first die attach temperature range,

wherein the first die attach material attaches the first semiconductor die to the thermally conductive flange, and

wherein the second die attach material attaches the second semiconductor die to the thermally conductive flange.

14. The multi-die package of claim 13 ,

wherein the second die attach material comprises one of AuSn, AgSn or CuSn,

wherein the first die attach temperature range is greater than the second die attach temperature range,

wherein the first die attach material directly attaches the first semiconductor die to the thermally conductive flange, and

wherein the second die attach material directly attaches the second semiconductor die to the thermally conductive flange.

15. A multi-die package, comprising:

a thermally conductive flange;

a first semiconductor die made of GaN attached to the thermally conductive flange via a first die attach material;

a second semiconductor die made of Si attached to the same thermally conductive flange as the first semiconductor die via a second die attach material; and

leads attached to the thermally conductive flange or to an insulating member secured to the thermally conductive flange,

wherein the leads are configured to provide external electrical access to the first and second semiconductor dies,

wherein the first die attach material is arranged to connect a back side of the first semiconductor die to a top side of the thermally conductive flange, and

wherein the second die attach material is arranged to connect a back side of the second semiconductor die to the top side of the thermally conductive flange.

16. The multi-die package of claim 15 ,

wherein the first semiconductor die is a main amplifier of a Doherty amplifier circuit and the second semiconductor die is a peaking amplifier of the Doherty amplifier circuit, and

wherein the first die attach material comprises a different material than the second die attach material.

17. The multi-die package of claim 15 ,

wherein a plurality of semiconductor dies made of GaN are attached to the thermally conductive flange via the first die attach material,

wherein a plurality of semiconductor dies made of Si are attached to the thermally conductive flange via the second die attach material

wherein the first die attach material has a first die attach temperature range, and

wherein the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

18. The multi-die package of claim 17 ,

wherein some of the semiconductor dies made of GaN are power transistor dies, and

wherein other ones of the semiconductor dies made of GaN are passive capacitor dies.

19. The multi-die package of claim 15 ,

wherein the first die attach material has a first die attach temperature range, and

wherein the second die attach material has a second die attach temperature range which is different than the first die attach temperature range.

20. The multi-die package of claim 15 ,

wherein the first semiconductor die is a GaN power amplifier die and the second semiconductor die is an LDMOS power amplifier die, and

wherein the first die attach material is configured to hold the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange.

21. The multi-die package of claim 15 , wherein the first die attach material comprises a different material than the second die attach material.

22. The multi-die package of claim 15 , wherein the first die attach material is configured to fixedly attach the first semiconductor die to the thermally conductive flange during attachment of the second semiconductor die to the thermally conductive flange,

wherein the first die attach material directly attaches the first semiconductor die to the thermally conductive flange, and

wherein the second die attach material directly attaches the second semiconductor die to the thermally conductive flange.

Assignments (9)
CHANGE OF NAME Recorded Aug 5, 2024
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 068179/0679 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2024
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 068310/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
CHANGE OF NAME Recorded Aug 16, 2023
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 064615/0365 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 16, 2020
From: INFINEON TECHNOLOGIES AMERICAS CORP.
To: INFINEON TECHNOLOGIES AG
Reel/Frame 052416/0306 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2019
From: INFINEON TECHNOLOGIES AG
To: CREE, INC.
Reel/Frame 049127/0994 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2018
From: CHANG, DEJIANG; ZHANG, XIKUN
To: INFINEON TECHNOLOGIES AG
Reel/Frame 045736/0012 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2018
From: KOMPOSCH, ALEXANDER; AGAR, BILL; LEFEVRE, MICHAEL
To: INFINEON TECHNOLOGIES NORTH AMERICA CORP.
Reel/Frame 045736/0041 →
MERGER AND CHANGE OF NAME Recorded May 7, 2018
From: INFINEON TECHNOLOGIES NORTH AMERICA CORP.; INTERNATIONAL RECTIFIER CORPORATION
To: INFINEON TECHNOLOGIES AMERICAS CORP.
Reel/Frame 045736/0119 →