IP Library Granted Patent US 10,580,757
Granted Patent B2
US 10,580,757 · App. 15/976,811 · Granted Mar 3, 2020

Face-to-face mounted IC dies with orthogonal top interconnect layers

Inventors: Eric M. Nequist (Saratoga, CA); Steven L. Teig (Menlo Park, CA); Javier DeLaCruz (San Jose, CA); Ilyas Mohammed (San Jose, CA); Laura Mirkarimi (San Jose, CA)
Assignee: Xcelsis Corporation
H01L25/0657H01L21/8221H01L23/49827H01L23/50H01L23/528H01L23/5225H01L23/5286H01L23/60H01L24/32H01L25/50H01L27/0688H01L24/06H01L24/08H01L24/80H01L2224/05571H01L2224/08147H01L2224/09181H01L2224/80895H01L2224/80896
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Quick Facts
Patent No.
US 10,580,757
App. No.
15/976,811
Granted
Mar 3, 2020
Kind
B2
Abstract

Some embodiments of the invention provide a three-dimensional (3D) circuit that is formed by stacking two or more integrated circuit (IC) dies to at least partially overlap and to share one or more interconnect layers that distribute power, clock and/or data-bus signals. The shared interconnect layers include interconnect segments that carry power, clock and/or data-bus signals. In some embodiments, the shared interconnect layers are higher level interconnect layers (e.g., the top interconnect layer of each IC die). In some embodiments, the stacked IC dies of the 3D circuit include first and second IC dies. The first die includes a first semiconductor substrate and a first set of interconnect layers defined above the first semiconductor substrate. Similarly, the second IC die includes a second semiconductor substrate and a second set of interconnect layers defined above the second semiconductor substrate. As further described below, the first and second dies in some embodiments are placed in a face-to-face arrangement (e.g., a vertically stacked arrangement) that has the first and second set of interconnect layers facing each other. In some embodiments, a subset of one or more interconnect layers of the second set interconnect layers of the second die has interconnect wiring that carries power, clock and/or data-bus signals that are supplied to the first IC die.

Claims (30)

1. A three-dimensional (3D) circuit comprising:

a first integrated circuit (IC) die comprising a first semiconductor substrate and a first set of interconnect layers defined on top of the first semiconductor substrate; and

a second IC die face-to-face mounted with the first IC die and comprising a second semiconductor substrate and a second set of interconnect layers defined on top of the second semiconductor substrate,

said first and second sets of interconnect layers connected by a plurality of connections, and

an outermost interconnect layer of the first die having a preferred wiring direction that is orthogonal to the preferred wiring direction of an outermost interconnect layer of the second die.

2. The 3D circuit of claim 1 , wherein the second IC die is rotated by 90 degrees before being mounted to the first IC die in order to have the preferred wiring directions of the outermost layers of the two dies be orthogonal with respect to each other.

3. The 3D circuit of claim 1 , wherein the first set of interconnect layers has N interconnect layers while the second set of interconnect layers has N+1 interconnect layers, wherein N is an integer.

4. The 3D circuit of claim 1 , wherein the first set of interconnect layers has N interconnect layers and the second set of interconnect layers has N interconnect layers, wherein N is an integer.

5. The 3D circuit of claim 1 , wherein the plurality of connections between the first and second sets of interconnect layers comprise a plurality of direct bonded connections.

6. The 3D circuit of claim 1 , wherein the plurality of connections between the first and second sets of interconnect layers comprise a plurality of vias, each via bonding a conductive pad on an interconnect layer of the first die with a conductive pad on an interconnect layer of the second die.

7. The 3D circuit of claim 1 , wherein the first and second dies are fabricated with a common or partially common set of masks as the first and second dies implement one IC design.

8. The 3D circuit of claim 1 , wherein the first and second dies are bonded to each other across silicon oxide or silicon nitride surfaces.

9. The 3D circuit of claim 1 , wherein the first and second dies have orthogonal crystalline directions after the first and second dies have been face-to-face mounted.

10. The 3D circuit of claim 1 , wherein the second die is a passive interposer.

11. An electronic device comprising:

a three-dimensional (3D) circuit comprising:

a first integrated circuit (IC) die comprising a first semiconductor substrate and a first set of interconnect layers defined on top of the first semiconductor substrate; and

a second IC die face-to-face mounted with the first IC die and comprising a second semiconductor substrate and a second set of interconnect layers defined on top of the second semiconductor substrate;

said first and second sets of interconnect layers connected by a plurality of connections; and

an outermost interconnect layer of the first die having a preferred wiring direction that is orthogonal to the preferred wiring direction of an outermost interconnect layer of the second die; and

another substrate on which the 3D circuit is mounted.

12. The electronic device of claim 11 , wherein the second IC die is rotated by 90 degrees before being mounted to the first IC die in order to have the preferred wiring directions of the outermost layers of the two dies be orthogonal with respect to each other.

13. The electronic device of claim 11 , wherein the first set of interconnect layers has N interconnect layers while the second set of interconnect layers has N+1 interconnect layers, wherein N is an integer.

14. The electronic device of claim 11 , wherein the first set of interconnect layers has N interconnect layers and the second set of interconnect layers has N interconnect layers, wherein N is an integer.

15. The electronic device of claim 11 , wherein the plurality of connections between the first and second sets of interconnect layers comprise a plurality of direct bonded connections.

16. The electronic device of claim 11 , wherein the plurality of connections between the first and second sets of interconnect layers comprise a plurality of vias, each via bonding a conductive pad on an interconnect layer of the first die with a conductive pad on an interconnect layer of the second die.

17. The electronic device of claim 11 , wherein the first and second dies are fabricated with a common or partially common set of masks as the first and second dies implement one IC design.

18. The electronic device of claim 11 , wherein the first and second dies are bonded to each other across silicon oxide or silicon nitride surfaces.

19. The electronic device of claim 11 , wherein the first and second dies have orthogonal crystalline directions after the first and second dies have been face-to-face mounted.

20. The electronic device of claim 11 , wherein the preferred wiring directions are horizontal and vertical wiring directions.

Assignments (2)
CHANGE OF NAME Recorded Sep 23, 2024
From: XCELSIS CORPORATION
To: ADEIA SEMICONDUCTOR INC.
Reel/Frame 069015/0766 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 27, 2018
From: NEQUIST, ERIC M.; TEIG, STEVEN L.; DELACRUZ, JAVIER; MOHAMMED, ILYAS; MIRKARIMI, LAURA
To: XCELSIS CORPORATION
Reel/Frame 047333/0629 →
Continuity (7)
Continuation In Part 15725030 · Oct 4, 2017
Provisional Application 62619910 · Jan 21, 2018
Provisional Application 62575240 · Oct 20, 2017
Provisional Application 62575184 · Oct 20, 2017
Provisional Application 62575259 · Oct 20, 2017
Provisional Application 62405833 · Oct 7, 2016
Related Publication 20180331072A1 · Nov 15, 2018
Cited By (6)
US 12,218,059 US 12,248,869 US 12,293,108 US 12,293,993 US 12,362,182 US 12,401,010