Granted Patent B2

US 10,615,219 · App. 15/981,713 · Granted Apr 7, 2020

Inventors: Yun-Chung Na (Zhubei, TW); Szu-Lin Cheng (Zhubei, TW); Shu-Lu Chen (Zhubei, TW); Han-Din Liu (Zhubei, TW); Hui-Wen Chen (Zhubei, TW)

Assignee: ARTILUX, INC.

H01L27/14685H01L27/14607H01L27/14623H01L27/14643H01L27/14689H01L27/14621H01L27/14627H01L27/14634

Abstract

Claims (24)

1. A method for fabricating an optical sensor, the method comprising:

forming, over a substrate, a first material layer comprising a first alloy of germanium and silicon having a first germanium composition;

forming, over the first material layer, a graded material layer comprising germanium and silicon;

forming, over the graded material layer, a second material layer comprising a second alloy of germanium and silicon having a second germanium composition; and

forming a lens over the first material layer,

wherein the first germanium composition is lower than the second germanium composition and a germanium composition of the graded material layer is between the first germanium composition and the second germanium composition and varies along a direction perpendicular to the substrate, and wherein at least one of the first material layer, the second material layer, or the graded material layer is configured to convert an optical signal to an electrical signal.

2. The method of claim 1 , further comprising:

forming a segregation layer over the substrate, wherein the segregation layer is formed before the first material layer is formed;

bonding a top layer formed over the substrate to a circuitry formed over a carrier substrate; and

removing the substrate and the segregation layer.

3. The method of claim 1 , further comprising:

forming a filter over the first material layer.

4. The method of claim 1 , wherein the first material layer is n-doped.

5. The method of claim 4 , wherein the second material layer is p-doped.

6. The method of claim 1 , wherein the second material layer is p-doped.

7. The method of claim 1 , further comprising:

forming a segregation layer over the substrate, wherein the segregation layer is formed before the first material layer is formed.

8. The method of claim 7 , further comprising:

bonding a top layer formed over the substrate to a circuitry formed over a carrier substrate.

9. The method of claim 1 , further comprising:

forming a coating layer over the first material layer.

10. The method of claim 1 , wherein the first material layer is p-doped.

11. The method of claim 10 , wherein the second material layer is n-doped.

12. The method of claim 1 , wherein the second material layer is n-doped.

Assignments (2)

Continuity (9)