IP Library Granted Patent US 10,411,222
Granted Patent B2
US 10,411,222 · App. 15/987,634 · Granted Sep 10, 2019

Transparent hybrid substrates, devices employing such substrates, and methods for fabrication and use thereof

Inventors: Liangbing Hu (Potomac, MD); Yonggang Yao (College Park, MD); Tian Li (Silver Springs, MD)
Assignee: University of Maryland, College Park
H01L51/5268H01L29/78603H01L31/0547H01L51/0097H01L31/0304H01L2251/5338
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Quick Facts
Patent No.
US 10,411,222
App. No.
15/987,634
Granted
Sep 10, 2019
Kind
B2
Abstract

A porous base substrate is infiltrated with a polymer material to form a hybrid substrate that combines the optical advantages of both. Prior to infiltration, the base substrate may exhibit relatively low optical transmittance. For example, the base substrate may be paper, textiles, aerogels, natural wood, or any other porous material. By infiltrating the base substrate with a polymer having a similar refractive index to that of the material of the base substrate, the transmittance can thus be improved, resulting in, for example, a transparent hybrid substrate that exhibits both relatively high optical haze and relatively high optical transmittance within the visible light spectrum. The hybrid substrate can thus serve as a base for fabricating electronic devices or can be coupled to electronic devices, especially optical devices that can take utilize the unique optical properties of the hybrid substrate.

Claims (46)

1. A device comprising:

a hybrid substrate including:

a base substrate having a plurality of pores therein, the pores being spaces between adjacent structures of the base substrate; and

a first polymer material filling substantially all of the pores of the base substrate,

wherein the pores of the base substrate are between 10 nm and 500 μm, inclusive, and

a dimension of each structure between respective adjacent pores is between 1 μm and 100 μm, inclusive.

2. The device of claim 1 , wherein the base substrate comprises at least one of paper composed of cellulose fibers, a woven textile composed of natural or artificial fibers, a non-woven textile composed of natural or artificial fibers, an aerogel, a matrix composed of natural or artificial fibers, a material with aligned pores, and natural wood material.

3. The device of claim 1 ,

wherein the first polymer material is different from a material of the base substrate, and

the first polymer material has a refractive index within 2% of a refractive index of the material of the base substrate.

4. The device of claim 1 , wherein at least one of:

an optical transmittance of the hybrid substrate with respect to light within a wavelength range of 400 nm to 1100 nm, inclusive, is greater than that of the base substrate without the first polymer material, and

an optical haze of the hybrid substrate with respect to light within the wavelength range of 400 nm to 1100 nm, inclusive, is greater than that of the first polymer material alone.

5. The device of claim 1 , wherein an optical transmittance of the hybrid substrate is 80-95% and an optical haze of the hybrid substrate is 50-95%.

6. The device of claim 1 , wherein at least one surface of the hybrid substrate has an arithmetic average surface roughness less than 10 nm.

7. The device of claim 1 , further comprising:

an electronic device formed over a surface of the hybrid substrate,

wherein the electronic device includes at least one of an electronic circuit, a light source, an energy converting device, and an energy storage device.

8. A method comprising:

(a) providing a base substrate having a plurality of pores therein; and

(b) filling the pores of the base substrate with a first polymer material to form a hybrid substrate,

wherein the pores of the base substrate are between 10 nm and 500 μm, inclusive, and

wherein (b) includes:

(b1) coating at least one surface of the base substrate with a precursor for the first polymer material; and

(b2) after (b1), curing to form the hybrid substrate, with the first polymer material infiltrating the base substrate.

9. The method of claim 8 , wherein the base substrate comprises at least one of paper composed of cellulose fibers, a woven textile composed of natural or artificial fibers, a non-woven textile composed of natural or artificial fibers, an aerogel, a matrix composed of natural or artificial fibers, a material with aligned pores, and natural wood material.

10. The method of claim 8 , wherein the first polymer material has a refractive index within 2% of a refractive index of a material of the base substrate.

11. The method of claim 8 , further comprising forming a flat template, wherein the curing of (b2) is performed with the flat template in contact with the at least one surface of the base substrate.

12. The method of claim 11 , wherein the flat template comprises a material that does not adhere to the cured first polymer material.

13. The method of claim 8 , wherein (b1) comprises passing the base substrate through a bath of the precursor for the first polymer material.

14. The method of claim 8 , wherein at least (b1) is performed using a roll-to-roll fabrication setup.

15. The method of claim 8 , further comprising, prior to (b2), removing excess precursor from the at least one surface of the base substrate.

16. The method of claim 8 , further comprising:

(c) forming an electronic device over a surface of the hybrid substrate,

wherein the electronic device includes at least one of an electronic circuit, a light source, an energy converting device, and an energy storage device.

17. The method of claim 16 , wherein (c) comprises at least one of:

transferring a previously fabricated electronic device onto or over the surface of the hybrid substrate; and

patterning of various layers deposited over the surface of the hybrid substrate to form the electronic device.

18. The method of claim 8 , wherein at least one of:

after (b), an optical transmittance of the hybrid substrate with respect to light within a wavelength range of 400 nm to 1100 nm, inclusive, is greater than that of the base substrate prior to (b), and

after (b), an optical haze of the hybrid substrate with respect to light within the wavelength range of 400 nm to 1100 nm, inclusive, is greater than that of the first polymer material alone.

19. The method of claim 8 , wherein, after (b), an optical transmittance of the hybrid substrate is 80-95% and an optical haze of the hybrid substrate is 50-95%.

20. The device of claim 1 ,

wherein the base substrate has a first surface and a second surface opposite the first surface,

the hybrid substrate includes a first sublayer formed on the first surface of the base substrate and a second sublayer formed on the second surface of the base substrate,

the first and second sublayers consist essentially of the first polymer material and each have a thickness less than 10 μm.

Assignments (3)
CONFIRMATORY LICENSE Recorded May 5, 2022
From: UNIVERSITY OF MARYLAND COLLEGE PARK CAMPUS
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 059856/0051 →
CONFIRMATORY LICENSE Recorded Sep 18, 2020
From: UNIVERSITY OF MARYLAND, COLLEGE PARK
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 053818/0493 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 16, 2019
From: HU, LIANGBING; YAO, YONGGANG; LI, TIAN
To: UNIVERSITY OF MARYLAND, COLLEGE PARK
Reel/Frame 049769/0284 →
Continuity (2)
Provisional Application 62510033 · May 23, 2017
Related Publication 20180342702A1 · Nov 29, 2018
Cited By (1)
US 12,576,551