Semiconductor device and method for fabricating the same
A semiconductor device with improved reliability and a method for fabricating the same are provided. The semiconductor device includes a substrate, a first spacer defining a gate trench on the substrate, and a gate electrode in the gate trench, wherein a height of an upper surface of the gate electrode adjacent to the first spacer increases in a direction away from the first spacer.
1. A semiconductor device comprising:
a substrate;
a first spacer defining a gate trench on the substrate, an upper surface of the first spacer being concave;
a gate structure in the gate trench, the upper surface of the first spacer being in contact with a sidewall of the gate structure at a first point;
a second spacer on a sidewall of the first spacer, an upper surface of the first spacer and an upper surface of the second spacer positioned at different heights from the substrate;
a source/drain region in the substrate on a sidewall of the gate structure;
a capping pattern covering an upper surface of the gate structure and the upper surface of the first spacer; and
a contact connected to the source/drain region on a sidewall of the second spacer, the second spacer interposed between the first spacer and the contact,
wherein the upper surface of the gate structure is curved such that a height of the upper surface of the gate structure adjacent to the first spacer increases in a direction away from the first spacer,
the gate structure includes a gate electrode and a gate insulating film between the gate electrode and the substrate and between the gate electrode and the first spacer,
a first distance from an uppermost portion of the gate electrode to an upper surface of the capping pattern is smaller than a second distance from an uppermost portion of the gate insulating film to the upper surface of the capping pattern,
the second distance is smaller than a third distance from the first point to the upper surface of the capping pattern,
the third distance is smaller than a fourth distance from a lowermost portion of the upper surface of the first spacer to the upper surface of the capping pattern, and
a sidewall of the contact is at least partially defined by the sidewall of the second spacer.
2. The semiconductor device of claim 1 ,
wherein an upper surface of the gate electrode adjacent to the gate insulating film is convex, and
an upper surface of the gate insulating film is convex.
3. The semiconductor device of claim 1 ,
wherein a height of the upper surface of the first spacer decreases and then increases in a direction away from the gate electrode.
4. The semiconductor device of claim 1 ,
wherein a first thickness of the gate insulating film in a direction parallel to an upper surface of the substrate is smaller than a second thickness of the first spacer in the direction parallel to the upper surface of the substrate.
5. The semiconductor device of claim 1 ,
wherein a first angle is formed at a point where an upper surface of the gate electrode meets a sidewall of the gate electrode, and
the first angle is an obtuse angle.
6. The semiconductor device of claim 1 ,
wherein a height of an upper surface of the gate insulating film decreases in a direction away from the gate electrode.
7. The semiconductor device of claim 1 ,
wherein the upper surface of the second spacer is higher than the upper surface of the gate electrode in a direction perpendicular to an upper surface of the substrate.
8. The semiconductor device of claim 1 ,
wherein the upper surface of the second spacer is lower than the upper surface of the gate electrode in a direction perpendicular to an upper surface of the substrate.
9. The semiconductor device of claim 1 ,
wherein the second spacer is extending along the sidewall of the first spacer and a sidewall of the capping pattern.
10. The semiconductor device of claim 1 ,
wherein the first spacer includes silicon oxide, and the second spacer includes silicon nitride.
11. The semiconductor device of claim 1 ,
wherein the upper surface of the gate structure includes a first portion adjacent to the first spacer and a second portion spaced apart from the first spacer,
a height of the first portion of the upper surface of the gate structure increases in a direction away from the first spacer, and
a height of the second portion of the upper surface of the gate structure is substantially the same in the direction away from the first spacer.
12. The semiconductor device of claim 1 .
wherein the contact is further in contact with a sidewall of the capping pattern.
13. The semiconductor device of claim 12 ,
wherein the upper surface of the second spacer is connected to the sidewall of the capping pattern.
14. A semiconductor device comprising:
a substrate;
a gate structure on the substrate, wherein the gate structure includes a gate electrode and a gate insulating film extending along a bottom surface and a sidewall of the gate electrode; and
a first spacer on a sidewall of the gate structure;
a capping pattern covering an upper surface of the gate structure and an upper surface of the first spacer; and
a second spacer on a sidewall of the first spacer and a sidewall of the capping pattern;
a source/drain region in the substrate on a sidewall of the gate structure; and
a contact connected to the source/drain region on a sidewall of the second spacer, the second spacer interposed between the first spacer and the contact,
wherein the upper surface of the gate structure and the upper surface of the first spacer are connected to each other to form a convex upper surface of the gate structure with respect to an upper surface of the substrate, and the first spacer includes a concave upper surface with respect to the upper surface of the substrate,
a first distance from an uppermost portion of the gate electrode to an upper surface of the capping pattern is smaller than a second distance from an uppermost portion of the gate insulating film to the upper surface of the capping pattern,
the second distance is smaller than a third distance from an uppermost portion of the upper surface of the first spacer to the upper surface of the capping pattern,
the third distance is smaller than a fourth distance from a lowermost portion of the upper surface of the first spacer to the upper surface of the capping pattern, and
a sidewall of the contact is defined by at least one of the sidewall of the second spacer, and the sidewall of the capping pattern.
15. The semiconductor device of claim 14 ,
wherein a first thickness of the gate insulating film in a direction parallel to an upper surface of the substrate is smaller than a second thickness of the first spacer in the direction parallel to the upper surface of the substrate.
16. The semiconductor device of claim 14 ,
wherein an uppermost portion of the convex upper surface of the gate structure is higher in a direction perpendicular to the upper surface of the substrate than a lowermost portion of the concave upper surface of the first spacer.
17. The semiconductor device of claim 14 ,
wherein the convex upper surface of the gate structure is adjacent to the sidewall of the first spacer.
18. The semiconductor device of claim 14 , wherein a bottom surface of the capping pattern has a wavy shape.