High quality factor MEMS silicon flower-of-life vibratory gyroscope

1. A resonator comprising:

an anchor;

an outer stiffener ring on an outer perimeter of the resonator;

at least one inner stiffener ring concentric with the outer stiffener ring; and

a plurality of curved springs coupled to the anchor and to the outer stiffener ring;

wherein each of the plurality of curved springs are coupled to the at least one inner stiffener ring;

wherein the outer stiffener ring has a first diameter that is greater than a second diameter of the inner stiffener ring; and

wherein each of the plurality of curved springs comprises a convex spring.

2. The resonator of claim 1 wherein:

the outer stiffener ring has a first diameter; and

the anchor is concentric with the outer stiffener ring and has a second diameter less than the first diameter.

3. The resonator of claim 1 wherein:

the plurality of curved springs have a rotational symmetry about a center axis with an N fold of symmetry, where N is a positive integer.

4. The resonator of claim 1 further comprising:

a plurality of inner stiffener rings each concentric with the outer stiffener ring;

wherein a pitch between each adjacent inner stiffener ring, or between the outer stiffener ring and a respective inner stiffener ring adjacent to the outer stiffener ring, or between the anchor and a respective inner stiffener ring adjacent to the anchor is the same.

5. The resonator of claim 1 further comprising:

a plurality of electrodes outside the outer perimeter of the resonator;

wherein the plurality of electrodes are not in physical contact with the outer stiffener ring; and

wherein a gap is between each electrode and the outer stiffener ring.

6. The resonator of claim 1 further comprising:

a plurality of internal electrodes;

wherein each internal electrode is located between a curved spring and another curved spring and the at least one inner stiffener ring, or between a curved spring and another curved spring and the anchor, or between a curved spring and another curved spring and the outer stiffener ring;

wherein the plurality of internal electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring; and

wherein a gap is between each internal electrode and adjacent curved springs, the at least one inner stiffener ring, the anchor and the outer stiffener ring.

7. The resonator of claim 1 wherein:

the outer stiffener ring has an aspect ratio ranging from 1:500 to 50:1; and

each of the curved springs of the plurality of curved springs has an aspect ratio ranging from 1:500 to 50:1.

8. A resonator comprising:

an anchor;

an outer stiffener ring on an outer perimeter of the resonator;

a first plurality of first curved convex springs, each having a first end and a second end coupled to the outer stiffener ring; and

a second plurality of second curved convex springs, wherein each respective second curved convex spring has a first end coupled to a first curved convex spring and a second end coupled to a different first curved convex spring;

wherein the first plurality of first curved convex springs point toward the anchor; and

wherein the second plurality of second curved convex springs point toward the anchor.

9. A resonator comprising:

an anchor;

an outer stiffener ring on an outer perimeter of the resonator;

a first plurality of first curved convex springs, each respective first curved convex spring pointing toward the outer stiffener ring and coupled to the outer stiffener ring at a point between a first end and a second end of the respective first curved convex spring; and

a second plurality of second curved convex springs, each respective second curved convex spring pointing toward the outer stiffener ring and coupled to a respective first end of a respective first curved convex spring and coupled to a respective first end of a different respective first curved convex spring.

10. A resonator comprising:

an anchor;

an outer stiffener ring on an outer perimeter of the resonator; and

a plurality of curved springs coupled to the anchor and to the outer stiffener ring;

wherein each of the plurality of curved springs comprises a convex spring; and

wherein the plurality of curved springs is configured in a flower-of-life pattern by overlapping curved springs to form outlines of leaf shapes;

wherein the outlines of leaf shapes formed comprise linear, elliptical, oval, ovate, deltoid, cordate, oblong, rhomboid, obovate, oblanceolate, orbicular, lanceolate, reniform, or spathulate outlines, or combinations thereof;

wherein the outlines of leaf shapes formed are symmetric and symmetrically arranged around the anchor; and

wherein the flower-of-life pattern has a rotational symmetry about a center axis with N fold of symmetry, where N is a positive integer.

11. The resonator of claim 10 wherein:

the outer stiffener ring has a first diameter; and

the anchor is concentric with the outer stiffener ring and has a second diameter less than the first diameter.

12. The resonator of claim 10 further comprising:

at least one inner stiffener ring concentric with the outer stiffener ring;

wherein the plurality of curved springs are coupled to the at least one inner stiffener ring; and

wherein the outer stiffener ring has a first diameter that is greater than a second diameter of the at least one inner stiffener ring.

13. The resonator of claim 10 further comprising:

a plurality of inner stiffener rings each concentric with the outer stiffener ring;

wherein a pitch between each adjacent inner stiffener ring, or between the outer stiffener ring and a respective inner stiffener ring adjacent to the outer stiffener ring, or between the anchor and a respective inner stiffener ring adjacent to the anchor is the same.

14. The resonator of claim 10 further comprising:

a plurality of electrodes outside the outer perimeter of the resonator;

wherein the plurality of electrodes are not in physical contact with the outer stiffener ring; and

wherein a gap is between each electrode and the outer stiffener ring.

15. The resonator of claim 10 further comprising:

a plurality of internal electrodes;

wherein each internal electrode is located between a curved spring and another curved spring and the at least one inner stiffener ring, or between a curved spring and another curved spring and the anchor, or between a curved spring and another curved spring and the outer stiffener ring;

wherein the plurality of internal electrodes are not in physical contact with the curved springs, the inner stiffener ring, the anchor or the outer stiffener ring; and

wherein a gap is between each internal electrode and adjacent curved springs, the at least one inner stiffener ring, the anchor and the outer stiffener ring.