Phase change memory with gradual resistance change
View Patent ↗A phase change memory cell is provided that includes a phase change material-containing structure sandwiched between first and second electrodes. The phase change material-containing structure has a resistance that changes gradually, and thus may be used in analog or neuromorphic computing. The phase change material-containing structure may contain a plurality of phase change material pillars, wherein each phase change material pillar has a different phase change material composition. Alternatively, the phase change material-containing structure may contain a doped phase change material layer in which a dopant concentration decreases laterally inward from an outermost surface thereof.
1. A semiconductor structure comprising:
a phase change memory cell located on a surface of a semiconductor substrate, wherein the phase change memory cell comprises a material stack of, and from bottom to top, a first electrode, a phase change material-containing structure having a resistance that changes gradually, and laterally inward, from an outermost surface, and a second electrode, wherein the phase change material-containing structure comprises a plurality of concentric phase change material pillars in which at least at outermost concentric phase change material pillar laterally surrounds a middle concentric phase change material pillar.
2. The semiconductor structure of claim 1 , wherein each concentric phase change material pillar has a different phase change material composition.
3. The semiconductor structure of claim 2 , wherein each concentric phase change material pillar comprises a GeSbTe alloy having a different atomic concentration of germanium.
4. The semiconductor structure of claim 3 , wherein the atomic concentration of germanium decreases from the outermost concentric phase change material pillar to the middle concentric phase change material pillar.
5. The semiconductor structure of claim 1 , wherein the phase change material-containing structure further comprises a concentric dielectric pillar laterally surrounding each concentric phase change material pillar.
6. The semiconductor structure of claim 5 , wherein the concentric dielectric pillar and each concentric phase change material pillar has a bottommost surface that is coplanar with each other.
7. The semiconductor structure of claim 1 , further comprising an interlevel dielectric material layer laterally surrounding the phase change memory cell and located on the semiconductor substrate.
8. The semiconductor structure of claim 7 , wherein a sidewall of the interlevel dielectric layer contacts a sidewall of the top electrode and the bottom electrode.
9. The semiconductor structure of claim 1 , wherein each concentric phase change material pillar has a different width.
10. The semiconductor structure of claim 1 , wherein the phase change memory cell has a total resistance that is equal to a total resistance of each concentric phase change material pillar in parallel.
11. The semiconductor structure of claim 1 , wherein the resistance increases form the outermost concentric phase change material pillar inward to the middle concentric phase change material pillar.
12. The semiconductor structure of claim 1 , wherein the resistance decreases form the outermost concentric phase change material pillar inward to the middle concentric phase change material pillar.
13. The semiconductor structure of claim 1 , wherein the phase change material-containing structure consist of the plurality of concentric phase change material pillars.
14. The semiconductor structure of claim 13 , wherein each neighboring pairs of concentric phase change material pillars are in direct physical contact with each other.