MEMS metal-quartz gyroscope

1. A gyroscope, comprising:

a shuttle having a body portion and a first plurality of fingers extending from the body portion, and a plurality of flexors;

a stator having a second plurality of fingers and an insulative substrate;

first and second spaced apart, fixed, support structures;

the plurality of flexors supporting the shuttle for vibratory motion relative to the stator, and such that the fingers of the shuttle are able to move in a vibrating motion adjacent the fingers of the stator without contacting the fingers of the stator; and

wherein portions of the fingers of at least one of the shuttle body portion and the stator are fabricated out of an insulator material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator, as well as capacitive coupling with the substrate and the shuttle body portion.

2. The gyroscope of claim 1 , wherein the body portion of the shuttle includes a quartz material layer on a portion thereof providing a piezoelectric effect.

3. The gyroscope of claim 2 , wherein the quartz material layer is disposed on the flexors.

4. The gyroscope of claim 1 , wherein the fingers of both the shuttle and the stator each have a grounded metal material layer.

5. The gyroscope of claim 1 , wherein the gyroscope includes a plurality of stators arranged on opposing sides of the shuttle, and wherein each said stator includes a plurality of fingers each being at least partially covered with a grounded metal material layer.

6. The gyroscope of claim 5 , further comprising an additional shuttle disposed between two of the plurality of stators, with the additional shuttle having, and being supported from the first and second support structures, by an additional plurality of flexors, and each one of the additional plurality of flexors including a quartz material layer thereon providing a piezoelectric effect.

7. The gyroscope of claim 1 , wherein the shuttle includes a mass secured thereto.

8. The gyroscope of claim 7 , wherein the mass is deposited in a void of the shuttle.

9. The gyroscope claim 1 , wherein the shuttle includes a substrate made from an electrically insulative material.

10. A gyroscope, comprising:

a plurality of shuttles each having a first plurality of fingers;

a plurality of stators, each having a second plurality of fingers;

a plurality of flexors operably associated with the plurality of shuttles;

first and second spaced apart, fixed, support structures;

the plurality of flexors supporting each one of the shuttles for vibratory motion relative to the stators, and such that the fingers of each one of the shuttles are able to move in vibratory motion adjacent the fingers of a corresponding pair of the stators; and

wherein portions of the first plurality of fingers of each of the shuttles and the portions of each one of the second plurality of fingers of the stators include a grounded metal material layer to reduce parasitic capacitive coupling between the first plurality of fingers of the shuttle and the second plurality of fingers of the stator.

11. The gyroscope of claim 10 , wherein each of the flexors includes a piezoelectric material layer.

12. The gyroscope of claim 11 , wherein the piezoelectric material layer comprises a layer of quartz.

13. The gyroscope of claim 10 , wherein at least one of the shuttles includes a mass supported thereon for increasing an overall mass of the at least one shuttle.

14. The gyroscope of claim 13 , wherein the mass comprises a heavy metal including at least one of Aluminum, Platinum, Palladium, Titanium, Copper, Gold or Ruthenium.

15. The gyroscope of claim 14 , wherein the mass is disposed in a void in the at least one of the shuttles.

16. The gyroscope of claim 13 , wherein each of the shuttles includes a mass supported thereon.

17. A method for forming a gyroscope, comprising:

forming a substrate having an insulating layer with a first insulating material, covered on opposing surfaces thereof by layers of a second insulating material;

etching a sensor pattern in one of the opposing layers of the second insulating material to form a plurality of fingers;

coating portions of the fingers with a metal material;

grounding the metal material;

removing portions of the second insulating material to form a shuttle having a plurality of flexors, a fully separate stator, and a support substrate, the shuttle and the stator each including a plurality of fingers, the flexors of the shuttle enabling vibratory motion of the shuttle relative to the stator; and

forming a piezoelectric material layer on at least portions the flexors for sensing a Coriolis force acting on the shuttle during motion of the shuttle.

18. The method of claim 17 , wherein forming a piezoelectric material layer comprises forming a quartz material layer.