IP Library Granted Patent US 11,170,835
Granted Patent B2
US 11,170,835 · App. 16/011,771 · Granted Nov 9, 2021

Field effect transistor constructions with gate insulator having local regions radially there-through that have different capacitance at different circumferential locations relative to a channel core periphery

Inventors: Kamal M. Karda (Boise, ID); Chandra Mouli (Boise, ID); Durai Vishak Nirmal Ramaswamy (Boise, ID); F. Daniel Gealy (Kuna, ID)
Assignee: Micron Technology, Inc.
G11C11/223H01L27/1159H01L29/4234H01L29/42324H01L29/42368H01L29/42376H01L29/42392H01L29/6684H01L29/788H01L29/78391
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Quick Facts
Patent No.
US 11,170,835
App. No.
16/011,771
Granted
Nov 9, 2021
Kind
B2
Abstract

A field effect transistor construction includes a semiconductive channel core. A source/drain region is at opposite ends of the channel core. A gate is proximate a periphery of the channel core. A gate insulator is between the gate and the channel core. The gate insulator has local regions radially there-through that have different capacitance at different circumferential locations relative to the channel core periphery. Additional constructions, and methods, are disclosed.

Claims (34)

1. A field effect transistor construction comprising:

a semiconductive channel core;

a source/drain region at opposite ends of the channel core;

a gate insulator surrounding the channel core;

a ferroelectric layer surrounding the gate insulator;

a gate surrounding the ferroelectric layer; and

wherein the gate insulator comprises a plurality of sides, at least two of the sides having different thicknesses.

2. The field effect transistor construction of claim 1 further comprising another layer of material between the gate insulator and the ferroelectric layer.

3. The field effect transistor construction of claim 1 wherein the construction comprises an MFMIS transistor construction.

4. A field effect transistor construction comprising:

a semiconductive channel core;

a source/drain region at opposite ends of the channel core;

a gate insulator surrounding the channel core;

a conductive layer surrounding the gate insulator; gate surrounding the conductive layer; and

wherein the gate insulator comprises a plurality of sides, at least two of the sides having different thicknesses.

5. The field effect transistor construction of claim 4 further comprising another layer of material surrounding the conductive layer.

6. The field effect transistor construction of claim 4 wherein the conductive layer comprises the same composition as the gate.

7. The field effect transistor construction of claim 4 wherein the conductive layer comprises a composition that is different from the composition of the gate.

8. The field effect transistor construction of claim 4 wherein the construction comprises an MFMIS transistor construction.

9. The field effect transistor construction of claim 4 wherein the conductive layer comprises one or more of conductively-doped semiconductive material(s), elemental metal(s), alloy(s) of elemental metals, and conductive metal compound(s).

10. A field effect transistor construction comprising:

a semiconductive channel core;

a source/drain region at opposite ends of the channel core, the channel core comprising a minimum channel length there-through from an edge of one of the source/drain regions to an edge of the other source/drain region;

a gate proximate a periphery of the channel core;

a gate insulator between the gate and the channel core, the gate insulator having local regions radially there-through that individually extend along all of the minimum channel length and have different capacitance at different circumferential locations along all of the minimum channel length relative to the channel core periphery;

ferroelectric material radially inward of the gate and conductive material radially inward of the ferroelectric material, the ferroelectric material and the conductive material being radially outward of the gate insulator; and

the gate insulator comprising material that is directly against the semiconductive channel core.

11. The field effect transistor construction of claim 10 being vertically oriented.

12. The field effect transistor construction of claim 10 wherein the gate insulator comprises a first pair of opposite sides intersecting a second pair of opposite sides at corners, the first pair of opposite sides comprising a thickness different from a thickness of the second pair of opposite sides.

13. The field effect transistor construction of claim 10 wherein the conductive material is against the gate insulator.

14. The field effect transistor construction of claim 10 wherein the conductive material is against the ferroelectric material.

15. The field effect transistor construction of claim 10 wherein the conductive material is against the gate insulator and against the ferroelectric material.

16. The field effect transistor construction of claim 10 wherein the conductive material comprises the same composition as the gate.

17. The field effect transistor construction of claim 10 wherein the conductive material comprises a composition different from a composition of the gate.

Assignments (2)
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →