Micromechanical device having a first cavity and a second cavity
A micromechanical device having a first cavity, which has a MEMS element, and having a second cavity. The second cavity is connected to the first cavity with a connection channel, the connection channel having a seal by which the first cavity and the second cavity are hermetically sealed from each other, the seal being able to be opened electrically.
1. A micromechanical device, comprising:
a first cavity, which has an MEMS element; and
a second cavity, wherein the second cavity is connected to the first cavity with a connection channel;
wherein the connection channel includes a seal by which the first cavity and the second cavity are hermetically sealed from each other, and
wherein the seal is openable electrically.
2. The micromechanical device of claim 1 , wherein the second cavity includes a getter material.
3. The micromechanical device of claim 1 , wherein the second cavity has a patterning of an inner surface.
4. The micromechanical device of claim 1 , wherein the first cavity and the second cavity are disposed in an at least partially overlapping manner in a direction perpendicular to a top or bottom surface of a substrate containing the first and second cavities.
5. The micromechanical device of claim 1 , wherein the micromechanical device has a bonding frame and a cap, wherein the bonding frame and the second cavity are disposed in an at least partially overlapping manner in a direction perpendicular to a top or bottom surface of the cap.
6. The micromechanical device of claim 1 , further comprising a getter material coated onto a surface of the second cavity.
7. The micromechanical device of claim 1 , further comprising a getter material deposited onto a patterning of an inner surface of the second cavity.
8. The micromechanical device of claim 1 , further comprising a bonding frame and a cap, wherein the second cavity is disposed at least partially under the bonding frame.
9. The micromechanical device of claim 1 , further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal heats up to transition from hermetically sealing the first and second cavities from each other to allowing communication of gases between the first and second cavities.
10. The micromechanical device of claim 1 , further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal opens due to a deformation.
11. The micromechanical device of claim 1 , further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal changes its porosity to allow communication of gases between the first and second cavities.
12. The micromechanical device of claim 1 , wherein the seal includes at least one of: silicon, or germanium.
13. The micromechanical device of claim 1 , wherein the seal includes aluminum.
14. The micromechanical device of claim 1 , wherein the seal includes polysilicon.
15. The micromechanical device of claim 1 , further comprising:
a third cavity, wherein the third cavity is connected to the first cavity with an additional connection channel;
wherein the additional connection channel includes an additional seal by which the first cavity and the third cavity are hermetically sealed from each other, and
wherein the additional seal is openable electrically independently of the seal.