Substrate holding member
A substrate holding member includes a base, and a plurality of convex parts formed at an upper surface of the base and configured to hold a substrate at top surfaces thereof. Each convex part has a root portion extending from the upper surface of the base, and a top portion formed on the root portion and including the top surface. In each convex part, a cross-sectional area of the root portion is larger than a cross-sectional area of the top portion. At least a portion including the top surface of the top portion is formed of a holding member made of a material having a greater Young's modulus than a material forming the base. The respective holding members are spaced apart from each other.
1. A substrate holding member comprising:
a base having an upper surface; and
a plurality of convex parts positioned on the upper surface of the base, each of the plurality of convex parts including a root portion extending from the upper surface of the base and a top portion positioned on the root portion, each top portion including a top surface, the plurality of convex parts configured to hold a substrate at the top surfaces, wherein
in each of the plurality of convex parts, a cross-sectional area of the root portion in a horizontal direction along the upper surface of the base is larger than a cross-sectional area of the top portion in the horizontal direction,
in each of the plurality of convex parts, a holding member includes at least a portion including the top surface of the top portion, the holding member comprising a material having a greater Young's modulus than a material forming the base,
a principal component of the material forming the holding member is silicon carbide such that a principal component of the material forming the top surface of the top portion is silicon carbide,
a principal component of the material forming the base is silicon carbide, and
the respective holding members of the plurality of convex parts are spaced apart from each other.
2. The substrate holding member according to claim 1 , wherein
each of the plurality of convex parts includes:
a first convex part comprising the root portion and has an upper end surface; and
a second convex part positioned on a portion of the upper end surface of the first convex part, and comprises the top portion, and
the holding member includes at least a portion of the second convex part.
3. The substrate holding member according to claim 2 , wherein the holding member includes the second convex part and an upper-end top portion of the first convex part, the upper-end top portion including at least the upper end surface of the first convex part.
4. The substrate holding member according to claim 1 , wherein
a principal component of the plurality of convex parts is the same as the principal component of the material forming the base.