Multi-inlet gas distributor for chemical vapor deposition coating of TRISO particles
A multi-inlet gas distributor for a fluidized bed chemical vapor deposition reactor that may include a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface. The distributor body may also include multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth. The distributor body may additionally include cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface. An apex may be formed on the exit surface at the intersection of the cone-shaped apertures.
1. A multi-inlet gas distributor for a fluidized bed chemical vapor deposition chamber, comprising:
a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface extending between and connecting the inlet surface to the exit surface;
multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth; and
cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface, wherein an apex is formed on the exit surface at an intersection of the cone-shaped apertures, and a saddle is formed with an arch-shaped edge along the exit surface at an intersection of at least one of the cone-shaped apertures with the side perimeter surface.
2. The multi-inlet gas distributor of claim 1 , wherein an apex ridge is formed between the intersection of each of adjacent ones of the cone-shaped apertures.
3. The multi-inlet gas distributor of claim 2 , where the apex ridge extends between the side perimeter surface and the apex.
4. The multi-inlet gas distributor of claim 1 , wherein the multiple-inlets are evenly spaced from a center of the exit surface.
5. The multi-inlet gas distributor of claim 1 , wherein shoulders are formed on the exit surface where two adjoining cone-shaped apertures intersect, but do not also intersect with the side perimeter surface.
6. The multi-inlet gas distributor of claim 1 , wherein a peak is formed at an intersection of two adjoining ones of the cone-shaped apertures with the side perimeter surface.
7. The multi-inlet gas distributor of claim 1 , wherein an overall thickness of the distributor body is between 1.25 and 2.30 inches.
8. The multi-inlet gas distributor of claim 1 , wherein the first depth of the multiple-inlets is about 0.25 inches.
9. The multi-inlet gas distributor of claim 1 , wherein an outside diameter of the multiple-inlets is about 7/64th inch.
10. The multi-inlet gas distributor of claim 1 , wherein a radius of the distributor body between a center thereof and the side perimeter surface is about 0.5 inches.
11. The multi-inlet gas distributor of claim 1 , wherein an outside diameter of the distributor body is between 2.0 inches and 6.0 inches.
12. The multi-inlet gas distributor of claim 1 , wherein an outside diameter of the distributor body is about 2.0 inches.
13. The multi-inlet gas distributor of claim 1 , wherein the cone-shaped apertures are right circular cones.
14. The multi-inlet gas distributor of claim 13 , wherein the right circular cones have an interior angle of between 45° and 55°.
15. The multi-inlet gas distributor of claim 1 , wherein a cross-section of the multi-inlet gas distributor has a shape selected from the group consisting of a circle, a triangle, a square, a pentagon, a hexagon, or an octagon.
16. The multi-inlet gas distributor of claim 1 , wherein the distributor body is formed from one or more materials selected from the group consisting of graphite, aluminum, steel, titanium, alloy-steel, plastic, or polymer.
17. A fluidized bed chemical vapor deposition reactor, comprising:
a fluidized bed chamber configured to hold fluidizing gas/vapor; and
a multi-inlet gas distributor coupled to the fluidized bed chamber, wherein the multi-inlet gas distributor includes:
a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface extending between and connecting the inlet surface to the exit surface;
multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth; and
cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface, wherein an apex is formed on the exit surface at an intersection of the cone-shaped apertures, and a saddle is formed with an arch-shaped edge along the exit surface at an intersection of at least one of the cone-shaped apertures with the side perimeter surface,
wherein the multi-inlet gas distributor is configured to receive the fluidizing gas/vapor through the multiple-inlets and inject the fluidizing gas/vapor through the cone-shaped apertures and into the fluidized bed chamber.
18. The fluidized bed chemical vapor deposition reactor of claim 17 , wherein shoulders are formed on the exit surface where two adjoining cone-shaped apertures intersect, but do not also intersect with the side perimeter surface.
19. The fluidized bed chemical vapor deposition reactor of claim 17 , wherein a peak is formed at an intersection of two adjoining ones of the cone-shaped apertures with the side perimeter surface.