Selective high-K formation in gate-last process
A method includes removing a dummy gate stack to form an opening between gate spacers, selectively forming an inhibitor film on sidewalls of the gate spacers, with the sidewalls of the gate spacers facing the opening, and selectively forming a dielectric layer over a surface of a semiconductor region. The inhibitor film inhibits growth of the dielectric layer on the inhibitor film. The method further includes removing the inhibitor film, and forming a replacement gate electrode in a remaining portion of the opening.
1. A method comprising:
removing a dummy gate stack to form an opening between gate spacers;
selectively forming an inhibitor film on sidewalls of the gate spacers, wherein the sidewalls of the gate spacers face the opening;
selectively forming a dielectric layer over a surface of a semiconductor region, wherein the inhibitor film inhibits growth of the dielectric layer on the inhibitor film;
removing the inhibitor film; and
forming a replacement gate electrode in a remaining portion of the opening.
2. The method of claim 1 further comprising:
forming a dielectric interfacial layer on exposed surfaces of the semiconductor region, wherein the dielectric layer is over and contacts the dielectric interfacial layer.
3. The method of claim 2 , wherein the dielectric interfacial layer is formed after the inhibitor film is formed.
4. The method of claim 1 , wherein the removing the inhibitor film comprises a thermal treatment.
5. The method of claim 1 , wherein the inhibitor film is formed using a Si—Cl based precursor.
6. The method of claim 1 , wherein the inhibitor film is formed using a Si—N based precursor.
7. The method of claim 1 , wherein the forming the inhibitor film comprises thermally treating a respective wafer comprising the gate spacers and the semiconductor region in a process gas at a temperature between about 50° C. and about 200° C.
8. The method of claim 1 , wherein after the inhibitor film is removed, a gap is formed between the dielectric layer and a closest edge of the gate spacers, and after the replacement gate electrode is formed, the gap remains.
9. The method of claim 1 , wherein after the inhibitor film is removed, a residue portion of the inhibitor film remains, and after the replacement gate electrode is formed, the residue portion is underlying the replacement gate electrode.
10. A method comprising:
forming an opening between gate spacers, wherein a surface of a semiconductor region is exposed to the opening;
forming an inhibitor film on sidewalls of the gate spacers, wherein the inhibitor film extends into the opening;
forming a gate dielectric, wherein the gate dielectric extends into the opening to contact the semiconductor region;
removing the inhibitor film; and
forming a gate electrode in the opening.
11. The method of claim 10 , wherein the inhibitor film is formed selectively on the sidewalls of the gate spacers, and the inhibitor film does not grow on the surface of the semiconductor region.
12. The method of claim 10 , wherein the gate dielectric is formed selectively on the surface of the semiconductor region, and the inhibitor film inhibits growth of the gate dielectric on the inhibitor film.
13. The method of claim 10 , wherein the inhibitor film is formed using a Si—Cl based precursor.
14. The method of claim 10 , wherein the inhibitor film is formed using a Si—N based precursor.
15. The method of claim 10 , wherein the forming the inhibitor film comprises thermally treating a respective wafer comprising the gate spacers and the semiconductor region in a process gas at a temperature between about 50° C. and about 200° C.
16. A method comprising:
removing a dummy gate stack to form an opening between gate spacers;
selectively forming an inhibitor film on sidewalls of the gate spacers, wherein the sidewalls of the gate spacers face the opening, wherein the inhibitor film is formed using a Si—Cl based precursor or a Si—N based precursor;
selectively forming a high-k dielectric layer over a surface of a semiconductor region, wherein the inhibitor film inhibits growth of the high-k dielectric layer on the inhibitor film;
removing the inhibitor film; and
forming a replacement gate electrode in a remaining portion of the opening.
17. The method of claim 16 further comprising:
forming a dielectric interfacial layer on exposed surfaces of the semiconductor region, wherein the high-k dielectric layer is over and contacts the dielectric interfacial layer.
18. The method of claim 17 , wherein the dielectric interfacial layer is formed after the inhibitor film is formed.
19. The method of claim 16 , wherein the removing the inhibitor film comprises a thermal treatment.
20. The method of claim 16 , wherein after the inhibitor film is removed, a gap is formed between the high-k dielectric layer and a closest edge of the gate spacers, and after the replacement gate electrode is formed, the gap remains.