Formation of wrap-around-contact to reduce contact resistivity
A method of forming a source/drain contact is provided. The method includes forming a sacrificial layer on a source/drain, and depositing an oxidation layer on the sacrificial layer. The method further includes heat treating the oxidation layer and the sacrificial layer to form a modified sacrificial layer. The method further includes forming a protective liner on the modified sacrificial layer, and depositing an interlayer dielectric layer on the protective liner. The method further includes forming a trench in the interlayer dielectric layer that exposes a portion of the protective liner.
1. A method of forming a source/drain contact, comprising:
forming a sacrificial layer on a source/drain;
depositing an oxidation layer on the sacrificial layer;
heat treating the oxidation layer and the sacrificial layer to form a modified sacrificial layer;
forming a protective liner on the modified sacrificial layer;
depositing an interlayer dielectric layer on the protective liner;
forming a trench in the interlayer dielectric layer that exposes a portion of the protective liner;
depositing a protective liner extension on the exposed sidewalls of the trench; and
removing the modified sacrificial layer to form a channel.
2. The method of claim 1 , further comprising forming a source/drain contact in the channel.
3. The method of claim 2 , wherein the heat treatment is conducted at a temperature in a range of about 400° C. to about 700° C. in a 100% nitrogen (N 2 ) atmosphere.
4. The method of claim 2 , wherein the modified sacrificial layer is silicon dioxide (SiO 2 ).
5. The method of claim 2 , wherein the sacrificial layer is silicon-germanium (SiGe), and the oxidation layer is germanium dioxide (GeO 2 ).
6. The method of claim 5 , wherein the source/drain is silicon germanium (SiGe), and the sacrificial layer is formed by epitaxial growth on the exposed surface of the source/drain.
7. The method of claim 6 , wherein the source/drain has a germanium concentration in a range of 20 atomic percent (at. %) to about 60 at. %.
8. The method of claim 7 , wherein the sacrificial layer has a germanium concentration in a range of 20 atomic percent (at. %) to about 65 at. %.
9. A method of forming a source/drain contact, comprising:
forming a sacrificial layer on a source/drain, wherein the sacrificial layer is silicon-germanium (SiGe);
depositing an oxidation layer on the sacrificial layer, wherein the oxidation layer is germanium dioxide (GeO 2 );
heat treating the oxidation layer and the sacrificial layer to form a modified sacrificial layer, wherein the modified sacrificial layer is silicon dioxide (SiO 2 );
forming a protective liner on the modified sacrificial layer;
depositing an interlayer dielectric layer on the protective liner; and
removing a portion of the interlayer dielectric layer to form a trench that exposes a portion of the protective liner.
10. The method of claim 9 , further comprising depositing a protective liner extension on the exposed sidewalls of the trench, and removing the modified sacrificial layer to form a channel.
11. The method of claim 10 , further comprising forming a source/drain contact in the channel.
12. The method of claim 11 , wherein the source/drain contact is formed of a material selected from the group consisting of titanium (Ti), cobalt (Co), and nickel (Ni).
13. The method of claim 12 , wherein the heat treatment is conducted at a temperature in a range of about 400° C. to about 700° C. in a 100% nitrogen (N 2 ) atmosphere.
14. The method of claim 13 , wherein the sacrificial layer has a thickness in a range of about 1 nanometers (nm) to about 3 nm.
15. The method of claim 13 , wherein the oxidation layer has a thickness in a range of about 2 nm to about 5 nm.