IP Library Granted Patent US 10,580,732
Granted Patent B2
US 10,580,732 · App. 16/028,370 · Granted Mar 3, 2020

Semiconductor device

Inventor: Akihiko Nomura (Kanagawa, JP)
Assignee: LAPIS SEMICONDUCTOR CO., LTD.
H01L23/5226H01L21/02118H01L21/02318H01L21/76898H01L23/481H01L23/5283H01L23/53238H01L21/76831H01L21/76832H01L2924/0002
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,580,732
App. No.
16/028,370
Granted
Mar 3, 2020
Kind
B2
Abstract

A semiconductor device includes a semiconductor substrate having a first main surface and a second main surface opposite to the first main surface; a first conductive layer disposed on the second main surface; a second conductive layer passing through the semiconductor substrate from the first main surface to the second main surface so that the second conductive layer is connected to the first conductive layer; an organic insulation film disposed to contact with the first conductive layer; and a first insulation layer disposed to contact with the organic insulation film. The second conductive layer has a first portion passing through the semiconductor substrate so that the first portion contacts with the semiconductor substrate through the organic insulation film and the first insulation layer.

Claims (23)

1. A semiconductor device comprising:

a semiconductor substrate having a first main surface and a second main surface opposite to the first main surface;

a first conductive layer disposed above the second main surface;

a second conductive layer passing through the semiconductor substrate from the first main surface to the second main surface, said second conductive layer being connected to the first conductive layer;

an organic insulation film disposed to contact with the first conductive layer; and

a first insulation layer disposed to contact with the organic insulation film,

wherein said second conductive layer is entirely formed in a two-layered structure,

said second conductive layer includes a first portion passing through the semiconductor substrate,

said first portion contacts with the semiconductor substrate through the organic insulation film and the first insulation layer,

said second conductive layer includes a second portion contacting with the first main surface through the organic insulation film and the first insulation layer, and

said second portion has a layer thickness greater than that of the first portion.

2. The semiconductor device according to claim 1 , wherein said organic insulation film is disposed to cover a surface of the first conductive layer above the second main surface side,

said organic insulation film includes an opening portion exposing the surface of the first conductive layer above the second main surface side, and

said second conductive layer is connected to the first conductive layer through the opening portion.

3. The semiconductor device according to claim 1 , further comprising a second insulation layer disposed to cover the second main surface,

wherein said first conductive layer is disposed on the second insulation layer.

4. The semiconductor device according to claim 1 , wherein said first conductive layer includes a third conductive layer disposed on the second main surface and a fourth conductive layer disposed on the third conductive layer, and

said second conductive layer is connected to the fourth conductive layer.

5. The semiconductor device according to claim 1 , wherein said second conductive layer is formed of a metal plating layer and a seed metal layer, and

said seed metal layer is disposed to contact with the organic insulation film.

6. The semiconductor device according to claim 1 , wherein said first portion vertically passes through the semiconductor substrate, and

said second portion extends horizontally over the first main surface perpendicular to the first portion.

7. The semiconductor device according to claim 5 , wherein said seed metal layer has a uniform thickness throughout the second conductive layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2022
From: ACHLYS TECHNOLOGIES INC.
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 060244/0398 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2022
From: LAPIS SEMICONDUCTOR CO., LTD.
To: ACHLYS TECHNOLOGIES INC.
Reel/Frame 059559/0280 →
Cited By (1)
US 12,494,399