IP Library Granted Patent US 10,497,817
Granted Patent B1
US 10,497,817 · App. 16/029,811 · Granted Dec 3, 2019

P-n diodes and p-n-p heterojunction bipolar transistors with diamond collectors and current tunneling layers

Inventor: Zhenqiang Ma (Middleton, WI)
Assignee: WISCONSIN ALUMNI RESEARCH FOUNDATION
H01L29/88H01L29/1602H01L29/205H01L29/267H01L29/45H01L29/6603H01L29/66037H01L29/7378H01L29/8613H01L21/0259H01L21/0262H01L21/02488H01L21/02527H01L21/02546H01L29/0665H01L29/0821H01L29/1004
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Quick Facts
Patent No.
US 10,497,817
App. No.
16/029,811
Granted
Dec 3, 2019
Kind
B1
Abstract

P-N diodes that include p-type doped diamond and devices, such as p-n-p heterojunction bipolar transistors, that incorporate the p-n diodes are provided. In the p-n diodes, the diamond at the p-n junction has a positive electron affinity and is passivated by a thin layer of inorganic material that provides a tunneling layer that passivates the bonding interface states, without hindering carrier transport across the interface.

Claims (19)

1. A p-n diode comprising:

a layer of p-type diamond having an upper surface with a positive electron affinity;

a layer of a single-crystalline n-type semiconductor material, the single-crystalline semiconductor material having a different lattice constant than the diamond; and

a current tunneling layer disposed between and in contact with the upper surface of the diamond and the lower surface of the layer of the single-crystalline n-type semiconductor material, wherein the current tunneling layer comprises an inorganic material having a bandgap that is wider than the bandgaps of the diamond and single-crystalline n-type semiconductor material and further wherein the inorganic material is not a native oxide of the single-crystalline n-type semiconductor material.

2. The diode of claim 1 , wherein the n-type semiconductor material is n-type GaAs.

3. The diode of claim 2 , wherein the inorganic material is aluminum oxide.

4. The diode of claim 2 having a breakdown voltage of at least 1 kV at a temperature of 25° C.

5. The diode of claim 1 , wherein the n-type semiconductor material is n-type Ge.

6. The diode of claim 5 , wherein the inorganic material is aluminum oxide.

7. A heterojunction bipolar transistor comprising:

a collector comprising a layer of p-type diamond having an upper surface with a positive electron affinity;

a base comprising a layer of a single-crystalline n-type semiconductor material, the single-crystalline n-type semiconductor material having a different lattice constant than the diamond;

a current tunneling layer disposed between and in contact with the upper surface of the layer of diamond and a lower surface of the layer of the single-crystalline n-type semiconductor material, wherein the current tunneling layer comprises an inorganic material having a bandgap that is wider than the bandgaps of the diamond and the single-crystalline n-type semiconductor material and further wherein the inorganic material is not a native oxide of the single-crystalline n-type semiconductor material; and

an emitter comprising a layer of a single-crystalline p-type semiconductor material.

8. The transistor of claim 7 , wherein the single-crystalline n-type semiconductor material is n-type GaAs and the single-crystalline p-type semiconductor material is p-type AlGaAs.

9. The transistor of claim 7 , wherein the single-crystalline n-type semiconductor material is n-type InGaAs and the single-crystalline p-type semiconductor material is p-type InAlAs.

10. The transistor of claim 7 , wherein the single-crystalline n-type semiconductor material is n-type Ge and the single-crystalline p-type semiconductor material is p-type Si.

11. The transistor of claim 10 , wherein the base-collector diode has a breakdown voltage of at least 15 Vat a temperature of 25° C.

12. The transistor of claim 7 further comprising a second current tunneling layer disposed between and in contact with an upper surface of the of the layer of the single-crystalline n-type semiconductor material and a lower surface of the layer of a single-crystalline p-type semiconductor material.

Assignments (2)
CONFIRMATORY LICENSE Recorded Dec 6, 2019
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 051443/0781 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 2, 2018
From: MA, ZHENQIANG
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 046700/0355 →