SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER
To reduce a temperature deviation on a surface of a substrate and shorten a temperature recovery time on the surface of the substrate, a substrate processing apparatus is provided. The substrate processing apparatus includes a substrate retainer configured to accommodate a plurality of substrates and heat insulating plates; a reaction tube within the substrate retainer; and a heating mechanism configured to heat the plurality of substrates, wherein the substrate retainer includes a substrate processing region where the plurality of substrates are accommodated and a heat insulating plate region where the heat insulating plates are accommodated. A reflectivity of each of the first heat insulating plates is accommodated in an upper layer portion of the heat insulating plate region and is higher than a reflectivity of each of the second heat insulating plates accommodated in a region other than the upper layer portion of the heat insulating plate region.
1 . A substrate processing apparatus comprising:
a substrate retainer configured to accommodate a plurality of substrates and a plurality of heat insulating plates;
a reaction tube in which the substrate retainer is accommodated; and
a heating mechanism configured to heat the plurality of substrates accommodated in the substrate retainer,
wherein the substrate retainer includes a substrate processing region in which the plurality of substrates are accommodated and a heat insulating plate region in which the plurality of heat insulating plates are accommodated, and
a reflectivity of each of first heat insulating plates accommodated in an upper layer portion of the heat insulating plate region among the plurality of heat insulating plates is higher than a reflectivity of each of second heat insulating plates accommodated in a region other than the upper layer portion of the heat insulating plate region among the plurality of heat insulating plates.
2 . The substrate processing apparatus of claim 1 , wherein:
the heat insulating plate region is provided below the substrate processing region; and
the first heat insulating plates are provided at an uppermost portion of the heat insulating plate region.
3 . The substrate processing apparatus of claim 1 , wherein a thickness of each of the first heat insulating plates is smaller than a thickness of each of the second heat insulating plates.
4 . The substrate processing apparatus of claim 1 , wherein an interval between the first heat insulating plates is smaller than an interval between the second heat insulating plates.
5 . The substrate processing apparatus of claim 4 , wherein the number of the first heat insulating plates is larger than the number of the second heat insulating plates.
6 . The substrate processing apparatus of claim 3 , wherein the number of the first heat insulating plates is larger than the number of the second heat insulating plates.
7 . The substrate processing apparatus of claim 1 , wherein the upper layer portion of the heat insulating plate region is a region in which the heating mechanism is provided on a side surface of the first heat insulating plate and the lower layer portion of the heat insulating plate region is a region in which the heating mechanism does not horizontally surround the side surface of the second heat insulating plate.
8 . The substrate processing apparatus of claim 1 , wherein the first heat insulating plates provided in the upper layer portion of the heat insulating plate region include a black heat insulating plate for absorbing heat or light.
9 . The substrate processing apparatus of claim 6 , wherein the second heat insulating plates include a black heat insulating plate.
10 . A substrate processing apparatus comprising:
a substrate retainer configured to accommodate a plurality of substrates and a plurality of heat insulating plates; and
a heating mechanism configured to heat the plurality of substrates accommodated in the substrate retainer,
wherein the substrate retainer includes a substrate processing region in which the plurality of substrates is accommodated and a heat insulating plate region in which the plurality of heat insulating plates is accommodated, and
heat insulating plates having a high reflectivity and black heat insulating plates for absorbing light are alternately accommodated in the heat insulating plate region.
11 . A substrate retainer comprising:
a substrate processing region in which a substrate is accommodated; and
a heat insulating plate region in which a plurality of heat insulating plates are accommodated,
wherein a reflectivity of a first heat insulating plate accommodated in an upper layer portion of the heat insulating plate region among the plurality of heat insulating plates is higher than a reflectivity of a second heat insulating plate accommodated in a region other than the upper layer portion of the heat insulating plate region among the plurality of heat insulating plates.