IP Library › Granted Patent US 11,335,620
Granted Patent B2
US 11,335,620 · App. 16/035,129 · Granted May 17, 2022

Package inductor having thermal solution structures

Inventors: Michael J. Hill (Gilbert, AZ); Anne Augustine (Chandler, AZ); Huong Do (Chandler, AZ); William Lambert (Chandler, AZ)
Assignee: Intel Corporation
H01L23/3672H01L21/4853H01L21/4857H01L21/4882H01L23/32H01L23/49822H01L23/49827H01L23/49838H01L23/5227H01L23/645H01L24/16H01L2224/16225H01L2924/1427H01L2924/19042H01L2924/19103
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Quick Facts
Patent No.
US 11,335,620
App. No.
16/035,129
Granted
May 17, 2022
Kind
B2
Abstract

Embodiments include a microelectronic device package structure having an inductor at least partially embedded within a substrate. At least one thermal solution structure may be on a surface of the inductor, and may be thermally coupled with the inductor. The one or more thermal solution structures provide a thermal pathway for cooling for the inductor, and extend a thermal time constant of the inductor.

Claims (37)

1. A microelectronic package structure comprising:

a substrate comprising a first side and a second side opposite the first side;

a die on a first side of the substrate, the die comprising an integrated circuit;

an inductor, wherein the inductor is at least partially embedded within the substrate; and

one or more thermal solution structures on a surface of the inductor, where the one or more thermal solution structures are thermally coupled the inductor;

a board electrically coupled to a second side of the substrate, and wherein a standoff region is between a surface of the board and the second side of the substrate, wherein the one or more thermal solution structures extend at least partially within the standoff region, wherein the board comprises at least one of a recess or an opening that extends through a length of the board, wherein at least one of the one or more of the thermal solution structures extend at least partially into one of the recess or the opening.

2. The microelectronic device package structure of claim 1 , wherein the one or more thermal solutions comprise one or more thermal masses, wherein the one or more thermal masses comprise a volumetric heat capacity greater than air, and wherein the one or more thermal solution structures comprise an electrically insulating material or a thermally conductive material.

3. The microelectronic device package structure of claim 2 , wherein the one or more thermal masses comprise one of a solder mount or an epoxy mount between the first side of the inductor and a surface of the one or more thermal masses, and wherein at least one capacitor is on the second side of the substrate, and is adjacent to the one or more thermal masses.

4. The microelectronic package structure of claim 1 , wherein the inductor comprises a plurality of conductive layers, and wherein a first side of the inductor is substantially coplanar with a second side of the substrate.

5. The microelectronic package structure of claim 1 , wherein the one or more thermal solution structures comprises a heat sink structure.

6. The microelectronic package structure of claim 5 , wherein the heat sink structure comprises a material that is thermally conductive and electrically conductive, or comprises a material that is thermally conductive and is an electrical insulator.

7. The microelectronic package structure of claim 5 , wherein a heat sink fin comprises one of a solder mount or an epoxy mount between the first side of the inductor and a surface of the one or more thermal masses.

8. An assembly comprising:

a substrate comprising a first side and a second side;

a die comprising an integrated circuit, wherein the die is on the first side of the substrate;

a plurality of solder interconnect structures on the second side of the substrate, adjacent to the one or more discrete components;

a board electrically coupled to the second side of the substrate;

an inductor, wherein the inductor is at least partially embedded within the substrate;

one or more thermal solution structures on a surface of the inductor and thermally coupled to the inductor, wherein the board comprises one of a cavity or an opening through the board, wherein at least one of the one or more thermal solution structures extends at least partially within one of the cavity or the opening, and wherein a different one of the one or more thermal solution structures comprises a length that is less than a length of a standoff region between the board and the substrate; and

one or more discrete components on the second side of the substrate, adjacent to the one or more thermal solution structures.

9. The assembly of claim 8 , wherein a socket is electrically coupled to the second side of the substrate, and is between the substrate and the board.

10. The assembly of claim 9 , wherein the socket comprising a socket opening, wherein the one or more thermal solution structures extend at least partially into the socket opening.

11. The assembly of claim 8 , wherein the die comprises a processor, wherein the processor includes voltage regulator circuitry, and wherein the inductor is electrically coupled to the voltage regulator circuitry.

12. The assembly of claim 8 wherein the one or more thermal solution structures comprises one or more of copper, aluminum, iron, steel, alumina or glass.

13. A method of fabricating a microelectronic package structure, comprising:

forming an inductor within a substrate, wherein a portion of the inductor is at least partially embedded within the substrate;

attaching one or more thermal solution structures to a surface of the inductor, wherein the one or more thermal solution structures are thermally coupled to the inductor;

attaching a die to the substrate on a side of the substrate opposite the surface of the inductor;

attaching a board to the substrate; and

forming at least one of a recess or an opening in the board, wherein at least one of the one or more thermal solutions extend at least partially into one of the recess or the opening.

14. The method of fabricating the microelectronic package structure of claim 13 , wherein forming the inductor comprises forming a plurality of inductor layers within the substrate, wherein individual layers are coupled to each other by one or more via structures.

15. The method of fabricating the microelectronic package structure of claim 13 wherein attaching the one or more thermal solution structures comprises:

applying a solder material or a thermally conductive epoxy material on the surface of the inductor; and

mounting the one or more thermal solution structures onto the solder material or onto the thermally conductive epoxy material.

16. The method of fabricating the microelectronic package structure of claim 13 further comprising:

attaching a socket onto the substrate, wherein the socket comprises a cavity;

attaching a board onto the socket, wherein the one or more thermal solution structures are at least partially extending into the cavity.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 23, 2018
From: HILL, MICHAEL J.; AUGUSTINE, ANNE; DO, HUONG; LAMBERT, WILLIAM
To: INTEL CORPORATION
Reel/Frame 046427/0901 →
Continuity (1)
Related Publication 20200020652A1 · Jan 16, 2020
Cited By (1)
US 12,550,412