Trench gate MOSFET
Provided is a trench gate MOSFET including a substrate of a first conductivity type, an epitaxial layer of the first conductivity type, a first conductive layer of a second conductivity type, a second conductive layer and an interlayer insulating layer. The epitaxial layer is disposed on the substrate and has at least one trench therein. The first conductive layer is disposed in the lower portion of the trench and in physical contact with the epitaxial layer. The second conductive layer is disposed in the upper portion of the trench. The interlayer insulating layer is disposed between the first conductive layer and the second conductive layer.
1. A trench gate MOSFET, comprising:
an epitaxial layer of a first conductivity type, disposed on a substrate of the first conductivity type and having at least one trench;
a first conductive layer of a second conductivity type, disposed in a lower portion of the trench and in physical contact with the epitaxial layer;
a second conductive layer, disposed in an upper portion of the trench;
an interlayer insulating layer, disposed between the first conductive layer and the second conductive layer; and
a metal layer disposed over the second conductive layer and electrically connected to the first conductive layer,
wherein the metal layer is electrically connected to the first conductive layer through a first contact plug located in the trench in an active area.
2. The trench gate MOSFET of claim 1 , further comprising an insulating liner disposed between a sidewall of the first conductive layer and the epitaxial layer.
3. The trench gate MOSFET of claim 1 , wherein the first contact plug has a strip shape, a block shape or a combination thereof.
4. The trench gate MOSFET of claim 1 , wherein the second conductive layer is disposed on an upper sidewall of the trench and between the first contact plug and the upper sidewall.
5. The trench gate MOSFET of claim 1 , further comprising a mask layer disposed between the second conductive layer and the first contact plug.
6. The trench gate MOSFET of claim 1 , wherein the second conductive layer is disposed on an upper sidewall of the trench and surrounds the first conductive layer.
7. The trench gate MOSFET of claim 6 , wherein the interlayer insulating layer is further disposed between the second conductive layer and the epitaxial layer.
8. The trench gate MOSFET of claim 1 , further comprising a dielectric layer disposed between the second conductive layer and the epitaxial layer and between the second conductive layer and the interlayer insulating layer.
9. The trench gate MOSFET of claim 1 , wherein a top width of the trench is substantially equal to a bottom width of the trench.
10. The trench gate MOSFET of claim 1 , wherein a top width of the trench is greater than a bottom width of the trench.
11. A trench gate MOSFET, comprising:
an epitaxial layer of a first conductivity type, disposed on a substrate of the first conductivity type and having at least one trench;
a first conductive layer of a second conductivity type, disposed in a lower portion of the trench and in physical contact with the epitaxial layer;
a second conductive layer, disposed in an upper portion of the trench;
an interlayer insulating layer, disposed between the first conductive layer and the second conductive layer; and
a metal layer disposed over the second conductive layer and electrically connected to the first conductive layer,
wherein the metal layer does not physically contact the first conductive layer in an active area, and
wherein the metal layer is electrically connected to an upper part of the first conductive layer through a first contact plug in a termination area.
12. The trench gate MOSFET of claim 11 , wherein the first contact plug has a strip shape, a block shape or a combination thereof.
13. The trench gate MOSFET of claim 11 , wherein a doping concentration of the upper part of the first conductive layer is greater than a doping concentration of a lower part of the first conductive layer.