Failure analyzing apparatus and failure analyzing method

1. A failure analyzing system comprising:

a tester performing an electric test on semiconductor memories and to output each of measurement results as respective test codes;

a failure analyzing apparatus to receive the test codes from the tester;

an electric failure analysis (EFA) apparatus receiving EFA content from the failure analyzing apparatus and outputting an EFA measurement result to the failure analyzing apparatus;

the failure analyzing apparatus comprising an arithmetic processor,

the arithmetic processor executing:

comparing current test codes for regions in a chip of a wafer with previous test codes for regions in a chip of a previous wafer, each of the current test codes being obtained by executing a plurality of types of electric tests by the tester for a corresponding region in the chip of the wafer, each of the previous test codes being obtained by previously executing the plurality of types of electric tests by the tester for a corresponding region in the chip of the previous wafer, the previous test codes indicating respective failure modes, the regions being smaller than each chip, and each chip including one of the semiconductor memories with memory cells arranged in a three-dimensional state;

when a first test code of the current test codes is identical with one of the previous test codes, specifying a failure mode corresponding to the first test code from the failure modes;

when the first test code of the current test codes is not identical with any of the previous test codes, generating first code distribution information that includes in-wafer and in-chip three-dimensional distributions, for the first test code;

determining whether the first test code is labeled by using the first code distribution information;

determining whether the first code distribution information is identical with second code distribution information, when the first test code is labeled by using the first code distribution information, the second code distribution information including in-wafer and in-chip three-dimensional distributions for the previous test codes;

when the first code distribution information is identical with the second code distribution information for one of the previous test codes, determining whether the first test code satisfies a classification minimum requirement of the identical previous test code; and

presenting a content of electric failure analysis (EFA) measurement that assumes a failure mode corresponding to the previous test code among the failure modes, when the first code distribution information is identical with the second code distribution information, and the first test code satisfies the classification minimum requirement of the previous test code.

2. The failure analyzing apparatus according to claim wherein the arithmetic processor further executes:

picking out test codes having a classification minimum requirement satisfied by the test code, when labeling of the second code distribution information is not performable;

generating combined second code distribution information by stacking, in a time direction, combinations of second code distribution information of all the test codes thus picked out as a combined second code distribution information; and

determining whether labeling of the combined second code distribution information is performable, wherein,

in the determining whether the second code distribution information is identical with the first code distribution information, the arithmetic processor further executes determining whether the combined second code distribution information is identical with the first code distribution information, when labeling of the combined second code distribution information is performable, and

in the presenting of the content of ETA measurement, the arithmetic processor executes presenting a content of EFA measurement that assumes a failure mode corresponding to the first code distribution information, when the combined second code distribution information is identical with the first code distribution information.

3. The failure analyzing apparatus according to claim 2 , wherein

in the determining whether the second code distribution information is identical with first code distribution information, the arithmetic processor further executes determining whether a matching rate of the combined second code distribution information with the first code distribution information is higher than a predetermined value, when the combined second code distribution information agrees to the first code distribution information, and

in the presenting of the content of EFA measurement, the arithmetic processor executes presenting the content of EFA measurement, when the matching rate of the combined second code distribution information with the first code distribution information is higher than the predetermined value.

4. The failure analyzing apparatus according to claim 2 , further comprising a first memory that stores production management information for managing a state of each wafer in production steps in units of a lot, wherein,

when it is determined that the combined second code distribution information is identical with the first code distribution information, and further when a lot to which the wafer corresponding to the combined second code distribution information belongs is present in a test step, the arithmetic processor executes giving an EFA measurement execution flag to a record corresponding to the lot in the production management information, and

the arithmetic processor executes presenting, in addition to the content of EFA measurement, a wafer with the EFA measurement execution flag attached thereto in the production management information, as a sample to be used.

5. The failure analyzing apparatus according to claim 4 , wherein the arithmetic processor executes monitoring an EFA object label and its occurrence frequency, when no lot to be subjected to EFA is present in the test step.

6. The failure analyzing apparatus according to claim further comprising a first memory that stores production management information for managing a state of each wafer in production steps in units of a lot, wherein,

when it is determined that the second code distribution information is identical with the first code distribution information, and the second code distribution information satisfies the classification minimum requirement of the first code distribution information, and further when a lot to which the wafer corresponding to the second code distribution information belongs is present in a test step, the arithmetic processor executes giving an EFA measurement execution flag to a record corresponding to the lot in the production management information, and

the arithmetic processor executes presenting, in addition to the content of EFA measurement, a wafer with the EFA measurement execution flag attached thereto in the production management information, as a sample to be used.

7. The failure analyzing apparatus according to claim 6 , wherein the arithmetic processor executes monitoring an EFA object label and its occurrence frequency, when no lot to be subjected to EFA is present in the test step.

8. The failure analyzing apparatus according to claim 1 , wherein a unit of the region smaller than the chip is a block serving as a unit for erasing in the chip.

9. The failure analyzing apparatus according to claim 8 , wherein a unit of the region smaller than the chip is the block, and a column formed by bundling a predetermined number of bit lines connecting a plurality of blocks arrayed in a predetermined direction.

10. The failure analyzing apparatus according to claim 1 , further comprising a second memory that stores failure mode specifying information in which the failure mode and the first code are correlated with each other, wherein

the arithmetic processor further executes generating the first code distribution information from the failure mode specifying information.

11. A failure analyzing method for a failure analyzing system comprising:

a tester performing an electric test on a semiconductor memory and to output each of measurement results as respective test codes;

a failure analyzing apparatus to receive the test codes from the tester;

an electric failure analysis (EFA) apparatus receiving EFA content from the failure analyzing apparatus and outputting a EFA measurement result to the failure analyzing apparatus;

the failure analyzing method comprising:

comparing current test codes for regions in a chip of a wafer with previous test codes for regions in a chip of a previous wafer, each of the current test codes being obtained by executing a plurality of types of electric tests by the tester for a corresponding region in the chip of the wafer, each of the previous test codes being obtained by previously executing the plurality of types of electric tests by the tester for a corresponding region in the chip of the previous wafer, the previous test codes indicating respective failure modes, the regions being smaller than each chip, and each chip including one of the semiconductor memories with memory cells arranged in a three-dimensional state;

when a first test code of the current test codes is identical with one of the previous test codes, specifying a failure mode corresponding to the first test code from the failure modes;

when the first test code of the current test codes is not identical with any of the previous test codes, generating first code distribution information that includes in-wafer and in-chip three-dimensional distributions, for the first test code;

determining whether the first test code is labeled by using the first code distribution information;

determining whether the first code distribution information is identical with second code distribution information, when the first test code is labeled by using the first code distribution information, the second code distribution information including in-wafer and in-chip three-dimensional distributions for the previous test codes;

when the first code distribution information is identical with the second code distribution information for one of the previous test codes, determining whether the first test code satisfies a classification minimum requirement of the identical previous test code; and

presenting a content of electric failure analysis (EFA) measurement that assumes a failure mode corresponding to the previous test code among the failure modes, when the first code distribution information is identical with the second code distribution information, and the first test code satisfies the classification minimum requirement of the previous test code.

12. The failure analyzing method according to claim 11 , further comprising:

picking out test codes having a classification minimum requirement satisfied by the first test code, when labeling of the second code distribution information is not performable;

generating combined second code distribution information by stacking, in a time direction, combinations of second code distribution information of all the test codes thus picked out as a combined second code distribution information; and

determining whether labeling of the combined second code distribution information is performable, wherein,

in the determining whether the second code distribution information is identical with first code distribution information, the method further comprises determining whether the combined second code distribution information is identical with first code distribution information containing in-wafer and in-chip three-dimensional distributions for the first code distribution information, when labeling of the combined second code distribution information is performable, and

in the presenting of the content of EFA measurement, the method comprises presenting a content of EFA measurement that assumes a failure mode corresponding to the first code distribution information, when the combined second code distribution information is identical with the first code distribution information.

13. The failure analyzing method according to claim 12 , wherein

in the determining whether the second code distribution information is identical with first code distribution information, the method further comprises determining whether a matching rate of the combined second code distribution information with the first code distribution information is higher than a predetermined value, when the combined second code distribution information is identical with the first code distribution information,

in the presenting of the content of EFA measurement, the method comprises presenting the content of EFA measurement, when the matching rate of the combined second code distribution information with the first code distribution information is higher than the predetermined value.

14. The failure analyzing method according to claim 12 ,

wherein, when it is determined that the combined second code distribution information is identical with the first code distribution information in the determining whether the second code distribution information is identical with first code distribution information, and further when a lot to which the wafer corresponding to the combined second code distribution information belongs is present in a test step, the method further comprises giving an EFA measurement execution flag to a record corresponding to the lot in production management information, which is information for managing a state of each wafer in production steps in units of a lot, and

in the presenting a content of EFA measurement, the method comprises presenting, in addition to the content of EFA measurement, a wafer with the EFA measurement execution flag attached thereto in the production management information, as a sample to be used.

15. The failure analyzing method according to claim 14 , wherein, in the giving an EFA measurement execution flag, the method comprises monitoring an EFA object label and its occurrence frequency, when no lot to be subjected to EFA is present in the test step.

16. The failure analyzing method according to claim 11 ,

wherein, when it is determined that the second code distribution information is identical with the first code distribution information in the determining whether the second code distribution information is identical with first code distribution information, and the second code distribution information satisfies the classification minimum requirement of the first code distribution information, and further when a lot to which the wafer corresponding to the second code distribution information belongs is present in a test step, the method further comprises giving an EFA measurement execution flag to a record corresponding to the lot in production management information, which is information for managing a state of each water in production steps in units of a lot, and

in the presenting of the content of EFA measurement, the method comprises presenting, in addition to the content of EFA measurement, a wafer with the EFA measurement execution flag attached thereto in the production management information, as a sample to be used.

17. The failure analyzing method according to claim 16 , wherein, in the giving an EFA measurement execution flag, the method comprises monitoring an EFA object label and its occurrence frequency, when no lot to be subjected to EFA is present in the test step.

18. The failure analyzing method according to claim 11 , wherein a unit of the region smaller than the chip is a block serving as a unit for erasing in the chip.

19. The failure analyzing method according to claim 18 , wherein a unit of the region smaller than the chip is the block, and a column formed by bundling a predetermined number of bit lines connecting a plurality of blocks arrayed in a predetermined direction.

20. The failure analyzing method according to claim 11 , further comprising generating the first code distribution information from failure mode specifying information in which the failure mode and the first code are correlated with each other.