IP Library Granted Patent US 10,861,776
Granted Patent B2
US 10,861,776 · App. 16/042,566 · Granted Dec 8, 2020

Flip chip self-alignment features for substrate and leadframe applications

Inventor: Marc Alan Mangrum (Manchaca, TX)
Assignee: Amkor Technology Singapore Holding Pte. Ltd.
H01L23/49541H01L21/4825H01L23/49548H01L23/544H01L24/81H01L21/4828H01L24/13H01L24/16H01L2223/54426H01L2223/54486H01L2224/13082H01L2224/13116H01L2224/13147H01L2224/16245H01L2224/81143H01L2224/81192H01L2224/81385H01L2224/81815H01L2924/14
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Quick Facts
Patent No.
US 10,861,776
App. No.
16/042,566
Granted
Dec 8, 2020
Kind
B2
Abstract

Methods and system for flip chip alignment for substrate and leadframe applications are disclosed and may include placing a semiconductor die on bond fingers of a metal leadframe, wherein at least two of the bond fingers comprise one or more recessed self-alignment features. A reflow process may be performed on the semiconductor die and leadframe, thereby melting solder bumps on the semiconductor die such that a solder bump may be pulled into each of the recessed self-alignment features and aligning the solder bumps on the semiconductor die to the bond fingers. The recessed self-alignment features may be formed utilizing a chemical etch process or a stamping process. A surface of the recessed self-alignment features or the bond fingers of the metal leadframe may be roughened. A solder paste may be formed in the recessed self-alignment features prior to placing the semiconductor die on the bond fingers of the metal leadframe.

Claims (51)

1. A method of manufacturing an electronic device, the method comprising:

placing a plurality of bumps of a semiconductor die on a top side of a plurality of bond fingers of a metal leadframe, wherein:

each of the plurality of bumps comprises a metal pillar and a solder cap;

each of at least two of the plurality of bond fingers comprises one or more curved sidewall recessed self-alignment features; and

each of the curved sidewall recessed self-alignment features comprises a maximum width at a top end positioned toward the semiconductor die and a minimum width at a bottom end positioned away from the semiconductor die; and

performing a reflow process, thereby melting the solder caps of the bumps such that at least one of the bumps is pulled into a respective one of the curved sidewall recessed self-alignment features to align the bumps to the bond fingers,

wherein:

a width of the bumps prior to said reflow process is no greater than a maximum width of the curved sidewall recessed self-alignment features,

the plurality of bond fingers comprise a first bond finger and a second bond finger; and

in a top-down view:

at least one of said one or more recessed self-alignment features of the first bond finger is longer in a first direction than in a second direction; and

at least one of said one or more recessed self-alignment features of the second bond finger is longer in the second direction than in the first direction.

2. The method of claim 1 , wherein the reflow process comprises a mass reflow process.

3. The method of claim 1 , comprising roughing a surface of at least one of the curved sidewall recessed self-alignment features at a location to be soldered.

4. The method of claim 1 , comprising, prior to said performing the reflow process:

forming a solder paste in each of the curved sidewall recessed self-alignment features; and

placing the bumps of the semiconductor die in contact with the formed solder paste.

5. The method of claim 1 , wherein, in the top-down view, each of the curved sidewall recessed self-alignment features is elliptical-shaped.

6. The method of claim 1 , wherein each of at least two of the plurality of bond fingers comprises a plurality of respective curved sidewall recessed self-alignment features.

7. An electronic device comprising:

a metal leadframe comprising a plurality of bond fingers, wherein:

each of at least two of the plurality of bond fingers comprises one or more respective curved sidewall recessed self-alignment features;

each of the curved sidewall recessed self-alignment features comprises a maximum width at a top end and a minimum width at a bottom end;

the at least two of the plurality of bond fingers comprise a first bond finger and a second bond finger; and

in a top-down view:

at least one of said one or more respective recessed self-alignment features of the first bond finger is longer in a first direction than in a second direction; and

at least one of said one or more respective recessed self-alignment features of the second bond finger is longer in the second direction than in the first direction; and

a semiconductor die bonded to a top side of the metal leadframe and comprising a plurality of bumps, wherein:

each of the bumps comprises a metal pillar; and

each of the bumps is soldered to a respective one of the curved sidewall recessed self-alignment features.

8. The electronic device of claim 7 , wherein said each of the bumps is mass-reflow soldered to a respective one of the curved sidewall recessed self-alignment features.

9. The electronic device of claim 7 , wherein a surface of at least one of the curved recessed self-alignment features is roughened at a location to be soldered.

10. The electronic device of claim 7 , wherein each of the bumps comprises a respective solder cap and is soldered to its respective one of the curved sidewall recessed self-alignment features utilizing more solder than included in the respective solder cap.

11. The electronic device of claim 7 , wherein, in the top-down view, each of the curved sidewall recessed self-alignment features is elliptical-shaped.

12. The electronic device of claim 7 , wherein at least one of the plurality of bond fingers comprises a plurality of respective curved sidewall recessed self-alignment features.

13. An electronic device comprising:

a metal leadframe comprising a plurality of bond fingers, wherein:

each of at least two of the plurality of bond fingers comprises one or more respective curved sidewall recessed self-alignment features with no flat surfaces;

each of the curved sidewall recessed self-alignment features is elliptical-shaped in a top-down view;

the at least two of the plurality of bond fingers comprise a first bond finger and a second bond finger; and

in the top-down view:

at least one of said one or more respective recessed self-alignment features of the first bond finger is longer in a first direction than in a second direction; and

at least one of said one or more respective recessed self-alignment features of the second bond finger is longer in the second direction than in the first direction; and

a semiconductor die bonded to a top side of the metal leadframe and comprising a plurality of bumps, wherein:

each of the bumps comprises a metal pillar;

each of the bumps is soldered to a respective one of the curved sidewall recessed self-alignment features; and

each of the bumps comprises a maximum width that is no greater than a width of its respective one of the curved sidewall recessed self-alignment features.

14. The electronic device of claim 13 , wherein said each of the bumps is mass-reflow soldered to a respective one of the curved sidewall recessed self-alignment features.

15. The electronic device of claim 13 , wherein a surface of at least one of the curved recessed self-alignment features is roughened at a location to be soldered.

16. The electronic device of claim 13 , wherein each of the bumps comprises a respective solder cap and is soldered to its respective one of the curved sidewall recessed self-alignment features utilizing more solder than included in the respective solder cap.

17. The electronic device of claim 13 , wherein at least one of the plurality of bond fingers comprises a plurality of respective curved sidewall recessed self-alignment features.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 15, 2020
From: MANGRUM, MARC ALAN
To: AMKOR TECHNOLOGY, INC.
Reel/Frame 054070/0295 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 12, 2020
From: AMKOR TECHNOLOGY, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE.LTD.
Reel/Frame 054046/0673 →
Cited By (1)
US 12,438,067