Semiconductor processing device
View Patent ↗A semiconductor processing device according to an embodiment includes a processing tank configured to store a chemical therein to allow a semiconductor substrate to be immersed in the chemical. A gas supply part is provided below the semiconductor substrate accommodated in the processing tank and is configured to supply air bubbles to the chemical from below the semiconductor substrate. A chemical supply part is provided above the gas supply part and below the semiconductor substrate and is configured to discharge the chemical caused to circulate from the processing tank, towards the air bubbles appearing from the gas supply part.
1. A semiconductor processing device comprising:
a processing tank configured to store a chemical to allow a semiconductor substrate to be immersed in the chemical;
a gas supply part provided below the semiconductor substrate accommodated in the processing tank and configured to supply air bubbles to the chemical from below the semiconductor substrate; and
a first and a second chemical supply parts provided above the gas supply part and below the semiconductor substrate and configured to discharge the chemical into the processing tank in a substantially horizontal direction, towards air bubbles appearing from the gas supply part, wherein
the first and second chemical supply parts are arranged on both sides above the gas supply part substantially symmetrically,
the first chemical supply part is arranged at a position shifted from immediately above the gas supply part to one side in a substantially horizontal direction, and
the second chemical supply part is arranged at a position shifted from immediately above the gas supply part to the other side in a substantially horizontal direction.
2. The device of claim 1 , wherein
the first and second chemical supply parts alternately discharge the chemical.