High pressure and high temperature anneal chamber
Embodiments of the disclosure relate to an apparatus and method for annealing semiconductor substrates. In one embodiment, a batch processing chamber is disclosed. The batch processing chamber includes a chamber body enclosing a processing region, a gas panel configured to provide a processing fluid into the processing region, a condenser fluidly connected to the processing region and a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid. The processing region is configured to retain a plurality of substrates during processing. The condenser is configured to condense the processing fluid into a liquid phase.
1. A batch processing chamber for annealing substrates under high pressure at high temperature comprising:
a chamber body enclosing an internal volume, the internal volume configured to accommodate a plurality of substrates disposed therein;
a gas panel configured to provide a processing fluid into the internal volume;
a condenser fluidly connected to the internal volume, the condenser configured to condense the processing fluid into liquid phase; and
a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid, the temperature-controlled fluid circuit comprising:
a gas conduit fluidly coupled to a port on the chamber body at a first end, the gas panel at a second end and the condenser at a third end;
a source conduit fluidly coupled to the gas panel at a first end and fluidly coupled to the gas conduit by an inlet isolation valve at a second end;
an exhaust conduit fluidly coupled to the condenser at a first end and fluidly coupled to the gas conduit by an outlet isolation valve at a second end; and
one or more heaters coupled to each of the source conduit, the exhaust conduit, and the gas conduit, the one or more heaters configured to maintain the processing fluid flowing through the source conduit, the exhaust conduit, and the pas conduit at a temperature above a condensation point of the processing fluid flowing through the temperature-controlled fluid circuit.
2. A batch processing chamber for annealing substrates under high pressure at high temperature comprising:
a chamber body enclosing an internal volume, the internal volume configured to accommodate a plurality of substrates disposed therein;
a gas panel configured to provide a processing fluid into the internal volume;
a condenser fluidly connected to the internal volume, the condenser configured to condense the processing fluid into liquid phase;
one or more temperature sensors operable to measure a temperature of a gas conduit; and
a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid, the temperature-controlled fluid circuit comprising:
a gas conduit fluidly coupled to a port on the chamber body at a first end, the gas panel at a second end and the condenser at a third end.
3. The batching processing chamber of claim 1 further comprising:
a cooling channel disposed adjacent to a door configured to sealably close the chamber body.
4. The batch processing chamber of claim 1 , wherein the chamber body is fabricated from a nickel-based superalloy.
5. A batch processing chamber for annealing substrates under high pressure at high temperature comprising:
a chamber body enclosing an internal volume, the internal volume configured to accommodate a plurality of substrates disposed therein;
a gas panel configured to provide a processing fluid into the internal volume;
a condenser fluidly connected to the internal volume, the condenser configured to condense the processing fluid into liquid phase;
an anti-convection plate disposed in the chamber body and separating the internal volume into a hot processing region in which the substrates are processed and a cooler region proximate a chamber body door; and
a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid, the temperature-controlled fluid circuit comprising:
a gas conduit fluidly coupled to a port on the chamber body at a first end, the gas panel at a second end and the condenser at a third end.