EUV pellicle structure and method for manufacturing same
A method for manufacturing an extreme ultraviolet (EUV) pellicle structure may include preparing a pellicle membrane that includes an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked, a first thin layer disposed on a top surface of the intermediate layer structure, and a second thin layer disposed on a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer, and disposing a cooling structure for absorbing heat from the pellicle membrane on an edge sidewall of the pellicle membrane at which the heat dissipation layers are exposed.
1. A method for manufacturing an extreme ultraviolet (EUV) pellicle structure, the method comprising:
preparing a pellicle membrane that comprises: an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked; a first thin layer disposed on a top surface of the intermediate layer structure; and a second thin layer disposed on a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer;
preparing a pellicle frame; and
disposing a cooling structure for absorbing heat from the pellicle membrane and the pellicle frame,
wherein the cooling structure is in contact with an outer sidewall of the pellicle membrane at which the heat dissipation layers are exposed, and
wherein the cooling structure is disposed on an outer sidewall of the pellicle frame.
2. The method of claim 1 , wherein the cooling structure comprises: first and second portions facing each other in a first direction and extending in parallel to each other; and third and fourth portions facing each other in a second direction intersecting the first direction and extending in parallel to each other,
wherein the first to fourth portions constitute a single unitary body,
wherein the disposing of the cooling structure comprises:
inserting the pellicle membrane into the cooling structure of the single unitary body.
3. The method of claim 2 , wherein the cooling structure further comprises: a receiving portion protruding from the first to fourth portions toward an inner space surrounded by the first to fourth portions,
wherein the disposing of the cooling structure comprises:
disposing the pellicle membrane on the receiving portion of the cooling structure in such a way that the second thin layer is adjacent to the receiving portion, thereby inserting the pellicle membrane into the cooling structure.
4. The method of claim 1 , wherein the cooling structure comprises: first and second segments facing each other in a first direction and extending in parallel to each other; and third and fourth segments facing each other in a second direction intersecting the first direction and extending in parallel to each other,
wherein the disposing of the cooling structure comprises:
adhering the first to fourth segments to the pellicle membrane independently of each other.
5. The method of claim 4 , wherein the cooling structure further comprises: a receiving portion protruding from the first to fourth segments toward an inner space surrounded by the first to fourth segments,
wherein the disposing of the cooling structure comprises:
disposing the pellicle membrane on the receiving portion of the cooling structure in such a way that the second thin layer is adjacent to the receiving portion, thereby inserting the pellicle membrane comprising the first and second thin layers into the cooling structure.
6. The method of claim 1 , wherein the heat dissipation layers transfer heat absorbed from the EUV transmission layers to the cooling structure, and
wherein the cooling structure emits heat absorbed from the EUV transmission layers and the heat dissipation layers to the outside.
7. The method of claim 1 , wherein the first thin layer radiates or emits heat absorbed from the EUV transmission layer to the outside.
8. The method of claim 1 , wherein the cooling structure covers outer surfaces of the pellicle frame, the first thin layer and the second thin layer.
9. An extreme ultraviolet (EUV) pellicle structure comprising:
a pellicle membrane comprising
an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked; and
a first thin layer adhered to a top surface of the intermediate layer structure; and
a second thin layer adhered to a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer,
a pellicle frame supporting the pellicle membrane, and
a cooling structure absorbing heat from the pellicle membrane and the pellicle frame, and surrounding the pellicle membrane and the pellicle frame,
wherein the cooling structure is configured to absorb heat from the pellicle membrane and the pellicle frame,
wherein the cooling structure is in contact with an outer sidewall of the pellicle membrane at which the heat dissipation layers are exposed, and
wherein the cooling structure is disposed on an outer sidewall of the pellicle frame.
10. The EUV pellicle structure of claim 9 , wherein the cooling structure includes: an inner surface being in direct contact with the heat dissipation layers of the pellicle membrane to receive heat from the heat dissipation layers; and an outer surface for emitting heat to the outside.
11. The EUV pellicle structure of claim 9 , wherein an outer surface of the cooling structure has a protruding pattern shape.
12. The EUV pellicle structure of claim 9 , wherein the cooling structure further comprises a receiving portion protruding toward an inner space of the cooling structure, in which the pellicle membrane is disposed, and
wherein the pellicle membrane is disposed on the receiving portion in such a way that the second thin layer is adjacent to the receiving portion.