Sensor device with integrated calibration system and calibration method
An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.
1. A device, comprising:
a heater;
a sensor element, the sensor element being a magnetic-field sensing element including a strip of magnetoresistive material;
a temperature sensor which, in use, senses a temperature of the sensor element;
a signal generator coupled to the heater, the signal generator, in use, heats the heater to a selected temperature; and
a calibration circuit which, in use, receives the sensed temperature of the sensor element from the temperature sensor, acquires a sensing signal from the sensor element in response to the sensed temperature having reached a threshold temperature, and calibrates the sensor element based on the acquired sensing signal.
2. The device of claim 1 wherein the heater is a resistive heater including a strip of conductive material.
3. The device of claim 1 , further comprising:
a first die, the first die including the sensor element and the temperature sensor; and
a second die electrically coupled to the first die, the second die including the calibration circuit and the signal generator.
4. The device of claim 3 wherein the first die is positioned on the second die.
5. The device of claim 4 wherein the heater is included in the first die, the heater being positioned between the sensor element and the second die.
6. The device of claim 4 wherein the heater is included in the first die, the sensor element being positioned between the heater and the second die.
7. The device of claim 4 wherein the heater is included in the second die.
8. The device of claim 3 , further comprising a substrate, the first die and the second die positioned on the substrate and laterally spaced apart from one another.
9. The device of claim 1 wherein the heater is spaced apart from the sensor element along a first direction, and the heater includes a plurality of heating elements spaced apart from one another along second direction that is transverse to the first direction.
10. A device, comprising:
a substrate;
a first die coupled to the substrate, the first die including:
a sensor element; and
a temperature sensor which, in use, senses a temperature of the sensor element; and
a second die coupled to the substrate, the second die positioned between the first die and the substrate, the second die including:
a calibration circuit which, in use, receives the sensed temperature of the sensor element from the temperature sensor, acquires a sensing signal from the sensor element in response to the sensed temperature having reached a threshold temperature, and calibrates the sensor element based on the acquired sensing signal; and
a heater which, in use, heats the sensor element.
11. The device of claim 10 , further comprising a signal generator which, in use, supplies a heating signal to the heater to heat the sensor element to the threshold temperature.
12. The device of claim 11 wherein the signal generator is included in the second die.
13. The device of claim 10 wherein the heater is included in the substrate.
14. The device of claim 10 , further comprising a cap attached to the substrate, the cap covering the first die and the second die.
15. A device, comprising:
a substrate having a surface;
a first die on the surface of the substrate, the first die including:
a sensor element; and
a temperature sensor which, in use, senses a temperature of the sensor element; and
a second die on the surface of the substrate and spaced apart from the first die, the second die including:
a calibration circuit which, in use, receives the sensed temperature of the sensor element from the temperature sensor, acquires a sensing signal from the sensor element in response to the sensed temperature having reached a threshold temperature, and calibrates the sensor element based on the acquired sensing signal; and
a heater which, in use, heats the sensor element.
16. The device of claim 15 , further comprising a signal generator which, in use, supplies a heating signal to the heater to heat the sensor element to the threshold temperature.
17. The device of claim 16 wherein the signal generator is included in the second die.
18. The device of claim 15 wherein the heater is included in the substrate.
19. The device of claim 15 , further comprising a cap attached to the substrate, the cap covering the first die and the second die.
20. The device of claim 15 wherein the sensor element is a magnetic-field sensing element including a strip of magnetoresistive material.