IP Library Granted Patent US 10,770,492
Granted Patent B2
US 10,770,492 · App. 16/054,067 · Granted Sep 8, 2020

Chip scale package and related methods

Inventors: Bingzhi Su (Boise, ID); Derek Gochnour (Boise, ID); Larry Kinsman (Boise, ID)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L27/14618H01L21/4803H01L21/561H01L23/08H01L23/10H01L23/315H01L23/3114H01L23/3142H01L23/564H01L24/13H01L2924/00014H01L2924/16195H01L2924/16235H01L2924/16588H01L2924/1715
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Quick Facts
Patent No.
US 10,770,492
App. No.
16/054,067
Granted
Sep 8, 2020
Kind
B2
Abstract

Implementations of semiconductor packages may include: a die coupled to a glass lid; one or more inner walls having a first material coupled to the die; an outer wall having a second material coupled to the die; and a glass lid coupled to the die at the one or more inner walls and at the outer wall; wherein the outer wall may be located at the edge of the die and the glass lid and the one or more inner walls may be located within the perimeter of the outer wall at a predetermined distance from the perimeter of the outer wall; and wherein a modulus of the first material may be lower than a modulus of the second material.

Claims (9)

1. A method for forming a semiconductor package, the method comprising:

providing a transparent lid;

patterning a first material on the transparent lid;

patterning a second material on the transparent lid; and

coupling a wafer to the transparent lid at the first material and at the second material;

wherein a modulus of the first material is lower than a modulus of the second material.

2. The method of claim 1 , wherein a maximum cavity wall stress on the outer wall and on the one or more inner walls is less than 40 MPa.

3. The method of claim 1 , wherein the semiconductor package is capable of passing a moisture sensitivity level (MSL) 1 test.

4. The method of claim 1 , wherein the first material is a dry film and the second material is a solder mask.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 047399, FRAME 0631 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064078/0001 →
SECURITY INTEREST Recorded Nov 1, 2018
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 047399/0631 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 3, 2018
From: SU, BINGZHI; GOCHNOUR, DEREK; KINSMAN, LARRY
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 046548/0786 →