FILM FORMING METHOD
According to an object to offer a film in quality with an industrial advantage, a method of forming a film is suggested. An embodiment of a method of the present invention includes turning a raw-material solution containing an aprotic solvent (that may be lactones or lactams) into a mist or droplets (step of atomization), carrying the mist or droplets into a film-formation chamber onto a base that is arranged in the film-formation chamber (step of carrying the mist), and causing a reaction of the mist or droplets preferably at a temperature that is 250° C. or less to form a film on the base (step of forming a film).
1 . A method of forming a film comprising:
turning a raw material solution that comprises an aprotic solvent by atomization into a mist or droplets;
carrying the mist or droplets by a carrier gas onto a base; and
forming a film on the base by a reaction of the mist or droplets.
2 . The method of forming the film of claim 1 , wherein the aprotic solvent is represented by Chemical Formula (1),
in the Chemical Formula (1), wherein
R 1 and R 2 are the same or different and each represents a hydrogen atom, a halogen atom, an optionally substituted hydrocarbon group or an optionally substituted heterocyclic group, and
R 1 and R 2 may be taken together to form a ring.
3 . The method of claim 1 , wherein the aprotic solvent is represented by Chemical Formula (2),
in the Chemical Formula (2), wherein
R 3 , R 4 , and R 5 are the same or different and each represents a hydrogen atom, a halogen atom, an optionally substituted hydrocarbon group, or an optionally substituted heterocyclic group, and two arbitrary groups selected from among R 3 , R 4 , and R 5 may bond each other to form a ring.
4 . The method according to claim 1 , wherein the raw material solution comprises an organometal halide compound.
5 . The method according to claim 1 , wherein the the raw material solution comprises an ammonium compound.
6 . The method according to claim 1 , wherein the reaction of the mist or droplets is a thermal reaction of the mist or droplets conducted at 250° C. or less.
7 . The method according to claim 1 , wherein the base is a glass substrate
8 . The method according to claim 1 , wherein the base comprises a tin-doped indium oxide layer or a fluorine-doped indium oxide layer.
9 . The method according to claim 1 , wherein the base comprises a titania layer.
10 . A film obtained by the method according to claim 1 .
11 . The film according to claim 10 comprising:
a Perovskite structure.
12 . A photoelectric-conversion element comprising:
the film according to claim 11 .
13 . The method according to claim 1 , wherein the raw material solution comprises an amine derivative.
14 . The method according to claim 1 , wherein the raw material solution comprises a metal complex.
15 . A method of manufacturing an organic light-emitting element comprising:
forming a hole transport layer and/or a light-emitting layer that is directly or via another layer on a base by forming a mist or droplets by atomization of a raw-material solution comprising an aprotic solvent, carrying the mist or droplets by a carrier gas onto a base, and forming the hole transport layer and/or the light-emitting layer on the base by causing a reaction of the mist or droplets on the base.
16 . The method of claim 15 , wherein the raw-material solution comprises an amine derivative.
17 . The method of claim 15 , wherein the raw-material solution comprises a metal complex.
18 . An organic light-emitting element obtained by the method according to claim 15 .
19 . The method according to claim 2 , wherein the raw material solution comprises an organometal halide compound.
20 . The method according to claim 3 , wherein the raw material solution comprises an organometal halide compound.