Charged particle beam device
A charged particle beam apparatus includes an irradiation system that supplies a converged charged particle beam to a sample and scans the sample with the charged particle beam, an imaging optical system that images the energy generated in the sample, a detection system that detects an image formed by the imaging optical system with an avalanche photodiode array, and a control unit that changes a pixel to be operated in a Geiger mode among pixels configuring the avalanche photodiode array according to movement of an irradiation range of the energy.
1. A charged particle beam apparatus comprising:
an irradiation system that supplies a converged charged particle beam to a sample and scans the sample with the charged particle beam;
an imaging optical system that images the energy generated in the sample;
a detection system that detects an image formed by the imaging optical system with an avalanche photodiode array; and
a control unit that changes a pixel to be operated in a Geiger mode among pixels configuring the avalanche photodiode array according to movement of an irradiation range of the energy.
2. The charged particle beam apparatus according to claim 1 ,
wherein the avalanche photodiode array includes a plurality of the pixels arranged in the matrix, and
wherein the apparatus further comprises a plurality of control lines formed in a matrix and selectively operates predetermined pixels among the plurality of pixels in the Geiger mode.
3. The charged particle beam apparatus according to claim 2 ,
wherein the energy is a transmitted electron.
4. The charged particle beam apparatus according to claim 3 , further comprising:
a processing unit that adds the detected image.
5. The charged particle beam apparatus according to claim 4 ,
wherein the control unit causes the pixel to be subjected to a reset operation before operating in the Geiger mode.
6. The charged particle beam apparatus according to claim 4 ,
wherein the control unit causes the pixel to be subjected to the reset operation in a unit of a row or a column before operating in the Geiger mode.
7. The charged particle beam apparatus according to claim 1 ,
wherein the energy is a transmitted electron.
8. The charged particle beam apparatus according to claim 1 , further comprising:
a processing unit that adds the detected image.
9. The charged particle beam apparatus according to claim 1 ,
wherein the control unit causes the pixel to be subjected to a reset operation before operating in the Geiger mode.
10. The charged particle beam apparatus according to claim 1 ,
wherein the avalanche photodiode array includes a plurality of the pixels arranged in a matrix, and
wherein the control unit causes the pixel to be subjected to a reset operation in a unit of a row or a column before operating in the Geiger mode.