SiC semiconductor device with current sensing capability
A SiC semiconductor device is provided that is capable of improving the detection accuracy of the current value of a principal current detected by a current sensing portion by restraining heat from escaping from the current sensing portion to a wiring member joined to a sensing-side surface electrode. The semiconductor device 1 includes a SiC semiconductor substrate, a source portion 27 including a principal-current-side unit cell 34 , a current sensing portion 26 including a sensing-side unit cell 40 , a source-side surface electrode 5 disposed above the source portion 27 , and a sensing-side surface electrode 6 that is disposed above the current sensing portion 26 and that has a sensing-side pad 15 to which a sensing-side wire is joined, and, in the semiconductor device 1 , the sensing-side unit cell 40 is disposed so as to avoid being positioned directly under the sensing-side pad 15.
1. A semiconductor device comprising:
a semiconductor layer made of SiC;
a source portion that is formed at the semiconductor layer and that includes a first unit cell on a principal current side;
a current sensing portion that is formed at the semiconductor layer and that includes a second unit cell on a current detection side;
a source-side surface electrode disposed above the source portion; and
a sensing-side surface electrode disposed so that at least one part of the sensing-side surface electrode includes a region positioned above the current sensing portion,
wherein the second unit cell is disposed at a position below the sensing-side surface electrode and so as to avoid being positioned directly under a joint part of a wiring member, and
the joint part of the wiring member is formed on a surface of the sensing-side surface electrode.
2. The semiconductor device according to claim 1 , further comprising:
an interlayer insulating film disposed between the current sensing portion and the sensing-side surface electrode; and
a gate insulating film formed at a lower position than the interlayer insulating film,
wherein the interlayer insulating film is formed thicker than the gate insulating film.
3. The semiconductor device according to claim 1 , wherein the current sensing portion is formed in a region surrounded by the source portion.
4. The semiconductor device according to claim 1 , further comprising a passivation film that selectively covers a portion positioned directly over the second unit cell of the sensing-side surface electrode and that has an opening by which a part of the sensing-side surface electrode is exposed as a sensing-side pad.
5. The semiconductor device according to claim 1 , wherein the first unit cell and the second unit cell have mutually same cell structures, respectively.
6. The semiconductor device according to claim 1 , wherein the current sensing portion is formed at only one place in an in-plane direction of the semiconductor layer.
7. The semiconductor device according to claim 2 , wherein the interlayer insulating film has a thickness of 1 μm or more.
8. The semiconductor device according to claim 2 , further comprising a gate-side surface electrode that is disposed on the semiconductor layer and that has a gate-side joint region to which a wiring member is joined,
wherein the interlayer insulating film is also disposed at a place directly under the gate-side joint region.
9. The semiconductor device according to claim 2 , wherein the interlayer insulating film includes a SiO 2 film.
10. The semiconductor device according to claim 9 , wherein the SiO 2 film contains P (phosphorus).
11. The semiconductor device according to claim 9 , wherein the SiO 2 film contains B (boron).
12. The semiconductor device according to claim 1 , wherein the sensing-side surface electrode includes an electrode having a layered structure in which Ti, TiN, and AlCu are stacked together in this order from a bottom of the layered structure to a top of the layered structure.
13. The semiconductor device according to claim 1 , further comprising:
a gate-side surface electrode disposed on the semiconductor layer; and
a passivation film that has an opening by which a part of the sensing-side surface electrode is exposed as a sensing-side pad and an opening by which a part of the gate-side surface electrode is exposed as a gate-side pad,
wherein the sensing-side pad and the gate-side pad are each formed so as to have a shape long in a same direction.
14. The semiconductor device according to claim 1 , further comprising a passivation film that selectively covers a portion of the sensing-side surface electrode and that has an opening by which the joint part of the wiring member is exposed as a sensing-side pad, wherein the portion of the sensing-side surface electrode is positioned directly over the second unit cell.