IP Library Granted Patent US 10,930,473
Granted Patent B2
US 10,930,473 · App. 16/062,650 · Granted Feb 23, 2021

Apparatus and method for plasma synthesis of carbon nanotubes

Inventors: Catharina Paukner (Cambridge, GB); Lukasz Kurzepa (Cambridge, GB); Krzysztof Kazimierz Koziol (Cambridge, GB)
Assignee: FGV Cambridge Nanosystems Limited
H01J37/32229B01J19/088B01J19/126B01J19/129C01B32/162C01B32/164H01J37/32174H01J37/32192H01J37/32311H01J37/32449H01J37/32522H05H1/30H05H1/46B01J2219/0869B01J2219/0875B01J2219/0892B01J2219/0898B82Y40/00H05H2001/4622
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Quick Facts
Patent No.
US 10,930,473
App. No.
16/062,650
Granted
Feb 23, 2021
Kind
B2
Abstract

Apparatus and method for plasma synthesis of carbon nanotubes couple a plasma nozzle to a reaction tube/chamber. A process gas comprising a carbon-containing species is supplied to the plasma nozzle. Radio frequency radiation is supplied to the process gas within the plasma nozzle, so as to sustain a plasma within the nozzle in use, and thereby cause cracking of the carbon-containing species. The plasma nozzle is arranged such that an afterglow of the plasma extends into the reaction tube/chamber. The cracked carbon-containing species also pass into the reaction tube/chamber. The cracked carbon-containing species recombine within the afterglow, so as to form carbon nanotubes in the presence of a catalyst.

Claims (14)

1. A method of synthesising carbon nanotubes, the method comprising:

supplying a process gas to a plasma nozzle that is coupled to a reaction tube or chamber, the process gas comprising a carbon-containing species, wherein the carbon-containing species comprises a gaseous hydrocarbon, natural gas, CH 4 , C 2 H 6 , C 2 H 4 , C 3 H 8 , C 4 H 10 , a liquid hydrocarbon, a liquefied hydrocarbon, toluene, or ethanol;

supplying radio frequency radiation to the process gas within the plasma nozzle, so as to sustain a plasma within the plasma nozzle, and thereby cause cracking of the carbon-containing species, wherein the plasma is generated at atmospheric pressure; and

providing a catalyst;

wherein the plasma nozzle is arranged such that an afterglow of the plasma extends into the reaction tube/chamber, the cracked carbon-containing species also passes into the reaction tube/chamber, and the cracked carbon-containing species recombines within the afterglow, so as to form carbon nanotubes in the presence of the catalyst; and

wherein the method further comprises applying cooling to the afterglow on exiting the plasma nozzle.

2. The method according to claim 1 , further comprising forming at least one vortex in the process gas within the plasma nozzle, and subjecting said at least one vortex to said radio frequency radiation.

3. The method according to claim 1 , wherein the radio frequency radiation comprises microwave radiation.

4. The method according to claim 1 , wherein the cooling comprises water cooling or gas cooling.

5. The method according to claim 1 , wherein the process gas further comprises a buffer gas, the buffer gas comprising argon, nitrogen, or helium.

6. The method according to claim 1 , wherein the process gas further comprises a buffer gas, the buffer gas comprising carbon dioxide.

7. The method according to claim 1 , wherein the afterglow within the reaction tube/chamber has an operating temperature of lower than 3500° C., lower than 2000° C., or around 1000° C.

8. The method according to claim 1 , further comprising extracting the carbon nanotubes using a continuous extraction process.

9. The method according to claim 1 , wherein the carbon-containing species is cracked without the process gas being introduced into a thermal zone; and wherein no external heating is applied during the formation of the carbon nanotubes.

Assignments (5)
CHANGE OF NAME Recorded Aug 6, 2021
From: CAMBRIDGE NANOSYSTEMS LIMITED
To: LEVIDIAN NANOSYSTEMS LIMITED
Reel/Frame 057099/0641 →
CHANGE OF NAME Recorded Aug 6, 2021
From: FGV CAMBRIDGE NANOSYSTEMS LIMITED
To: CAMBRIDGE NANOSYSTEMS LIMITED
Reel/Frame 057099/0646 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 12, 2018
From: KOZIOL, KRZYSZTOF KAZIMIERZ
To: FGV CAMBRIDGE NANOSYSTEMS LIMITED
Reel/Frame 047474/0162 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 12, 2018
From: PAUKNER, CATHARINA
To: FGV CAMBRIDGE NANOSYSTEMS LIMITED
Reel/Frame 047474/0305 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 12, 2018
From: KURZEPA, LUKASZ
To: FGV CAMBRIDGE NANOSYSTEMS LIMITED
Reel/Frame 047502/0143 →
Priority Claims (1)
GB 1522106 · Dec 15, 2015 · national
Continuity (1)
Related Publication 20190006151A1 · Jan 3, 2019
Cited By (5)
US 12,195,338 US 12,214,420 US 12,261,023 US 12,311,447 US 12,406,829