IP Library Granted Patent US 10,727,261
Granted Patent B2
US 10,727,261 · App. 16/069,304 · Granted Jul 28, 2020

Image pickup device and electronic apparatus

Inventors: Satoe Miyata (Tokyo, JP); Itaru Oshiyama (Kanagawa, JP)
Assignee: Sony Corporation
H01L27/1462H01L27/1463H01L27/14621H01L27/14623H01L27/14645H01L27/14627H01L27/14636
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Quick Facts
Patent No.
US 10,727,261
App. No.
16/069,304
Granted
Jul 28, 2020
Kind
B2
Abstract

The present technology relates to an image pickup device and an electronic apparatus that are configured to enhance characteristics. A solid-state image pickup device includes a photoelectric conversion section that is arranged on a semiconductor substrate and configured to photoelectrically convert an incident light, a moth-eye section that includes recesses and projections formed on a surface on a light incident side in the semiconductor substrate and has, when a cross section approximately parallel to a direction toward the photoelectric conversion section from the light incident side is viewed, a recessed portion protruding toward the side of the photoelectric conversion section, the recessed portion having a curvature or a polygonal shape, and a region that is arranged adjacent to and opposite to the photoelectric conversion section of the moth-eye section and has a refractive index different from a refractive index of the semiconductor substrate.

Claims (26)

1. An image pickup device comprising:

a first photoelectric conversion section disposed in a semiconductor substrate and configured to photoelectrically convert incident light;

a moth-eye section formed in a surface of a light incident side of the semiconductor substrate such that, in a cross sectional view, the moth-eye section includes first recessed portions arranged over the first photoelectric conversion section and protruding toward the first photoelectric conversion section, the first recessed portions having a curvature or a polygonal shape;

a second photoelectric conversion section adjacent to the first photoelectric conversion section; and

at least one layer on a light incident side of the moth-eye section and having a refractive index different from a refractive index of the semiconductor substrate,

wherein, in the cross sectional view, the moth-eye section includes second recessed portions arranged over the second photoelectric conversion section, and

wherein a number of the first recessed portions is equal to a number of the second recessed portions.

2. The image pickup device according to claim 1 , wherein projected portions in the moth-eye section protruding away from the first photoelectric conversion section and the second photoelectric conversion section have a curvature or a polygonal shape.

3. The image pickup device according to claim 2 , wherein the projected portions have the curvature, and wherein the curvature of at least one of the first or second recessed portions is larger than the curvature of at least one of the projected portions.

4. The image pickup device according to claim 2 , wherein the curvature of the at least one of the first or second recessed portions is approximately equal to the curvature of the at least one of the projected portions.

5. The image pickup device according to claim 1 , wherein the refractive index of the semiconductor substrate is larger than the refractive index of the at least one layer.

6. The image pickup device according to claim 1 , wherein the first and second recessed portions are conical-shaped.

7. The image pickup device according to claim 1 , wherein the projected portions are conical-shaped.

8. The image pickup device according to claim 6 , wherein the first and second recessed portions are arranged in a lattice structure.

9. The image pickup device according to claim 6 , wherein the the first and second recessed portions have sizes or shapes that are different from each other and are irregularly arranged.

10. The image pickup device according to claim 1 , wherein the first and second recessed portions are arranged linearly.

11. The image pickup device according to claim 1 , further comprising: an inter-pixel separation section configured to electrically separate the first and second photoelectric conversion sections from each other.

12. The image pickup device according to claim 11 , further comprising:

an inter-pixel light blocking film is formed inside the inter-pixel separation section.

13. An electronic apparatus comprising:

a first photoelectric conversion section disposed in a semiconductor substrate and configured to photoelectrically convert incident light;

a moth-eye section formed in a surface of a light incident side of the semiconductor substrate such that, in a cross sectional view, the moth-eye section includes first recessed portions arranged over the first photoelectric conversion section and protruding toward the first photoelectric conversion section, the first recessed portions having a curvature or a polygonal shape;

a second photoelectric conversion section adjacent to the first photoelectric conversion section; and

at least one layer on a light incident side of the moth-eye section and having a refractive index different from a refractive index of the semiconductor substrate,

wherein, in the cross sectional view, the moth-eye section includes second recessed portions arranged over the second photoelectric conversion section, and

wherein a number of the first recessed portions is equal to a number of the second recessed portions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 11, 2018
From: MIYATA, SATOE; OSHIYAMA, ITARU
To: SONY CORPORATION
Reel/Frame 046322/0836 →
Priority Claims (1)
JP 2016-009695 · Jan 21, 2016 · national
Continuity (1)
Related Publication 20190027518A1 · Jan 24, 2019
Cited By (2)
US 12,278,254 US 12,452,512