Monolithic integration device and micro total analysis system comprising a micro-fluidic flow channel
The present invention discloses a monolithic integration device and micro Total Analysis System. The monolithic integration device for sensing comprises: a micro-LED; an optical detector; and a sensing channel, wherein the micro-LED is coupled with the sensing channel and is configured for emitting light into the sensing channel, and the optical detector is coupled with the sensing channel and is configured for sensing the light which is emitted by the micro-LED and travels through at least one part of the sensing channel. An embodiment of this invention proposes a new monolithic integration device for sensing with built-in light source and optical detection system.
1. A monolithic integration device for sensing, comprising:
a micro-LED;
an optical detector; and
a sensing channel,
wherein the micro-LED is coupled with the sensing channel and is configured for emitting light into the sensing channel, and the optical detector is coupled with the sensing channel and is configured for sensing the light which is emitted by the micro-LED and travels through at least one part of the sensing channel, and
wherein the sensing channel is a micro-fluidic channel in which micro-fluidics can flow.
2. The monolithic integration device according to claim 1 , wherein the micro-LED is mounted on a substrate and a cover with trench is attached on the substrate to form the sensing channel.
3. The monolithic integration device according to claim 1 , wherein the micro-LED and the optical detector are located in the same cross section of the sensing channel.
4. The monolithic integration device according to claim 1 , wherein the sensing channel is a waveguide in which the light emitted by the micro-LED can travel.
5. The monolithic integration device according to claim 4 , wherein the waveguide is a planar waveguide and the micro-LED is mounted on a surface of the planar waveguide.
6. The monolithic integration device according to claim 5 , further comprising: a coupling component for coupling light emitted by the micro-LED into the waveguide.
7. The monolithic integration device according to claim 4 , wherein the micro-LED and the optical detector are arranged in a longitudinal direction of the sensing channel.
8. The monolithic integration device according to claim 1 , wherein the micro-LED is 1-100 μm in side length and 1-10 μm in thickness.
9. A micro Total Analysis System comprising the monolithic integration device for sensing of claim 1 .
10. The monolithic integration device according to claim 1 , wherein an array of the micro-LEDs is built in the sensing channel.