IP Library Granted Patent US 10,559,349
Granted Patent B2
US 10,559,349 · App. 16/078,582 · Granted Feb 11, 2020

Polarization gate stack SRAM

Inventors: Daniel H. Morris (Hillsboro, OR); Uygar E. Avci (Portland, OR); Ian A. Young (Portland, OR)
Assignee: Intel Corporation
G11C11/412G11C8/16G11C11/419H01L27/11G11C11/223
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,559,349
App. No.
16/078,582
Granted
Feb 11, 2020
Kind
B2
Abstract

One embodiment provides an apparatus. The apparatus includes a first inverter comprising a first pull up transistor and a first pull down transistor; a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor; a first access transistor coupled to the first inverter; and a second access transistor coupled to the second inverter. A gate electrode of one transistor of each inverter comprises a polarization layer.

Claims (30)

1. An apparatus comprising:

a first inverter comprising a first pull up transistor and a first pull down transistor;

a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor;

a first access transistor coupled to the first inverter; and

a second access transistor coupled to the second inverter, a gate stack of one transistor of each inverter comprising a polarization layer between and in contact with a gate oxide and a respective channel of each transistor that comprises the polarization layer.

2. The apparatus of claim 1 , wherein each pull down transistor comprises the polarization layer.

3. The apparatus of claim 1 , wherein each pull up transistor comprises the polarization layer.

4. The apparatus of claim 1 , wherein the first access transistor and the second access transistor each comprises a polarization layer.

5. The apparatus of claim 1 , wherein the polarization layer comprises a ferroelectric material selected from the group comprising BaTiO 3 (Barium titanium oxide), PbTiO 3 (Lead titanium oxide), Pb(Zr0.2Ti0.8)O 3 (Lead zirconium titanium oxide), BiFe0.95Ru0.05O 3 (Bismuth iron ruthenium oxide), HfOx (Hafnium oxide) and/or HfZrOx (Hafnium Zirconium Oxide).

6. The apparatus of claim 1 , wherein a gate stack of another transistor comprises a polarization layer sandwiched between a gate oxide layer and a gate metal layer.

7. The apparatus of claim 1 , wherein the polarization layer comprises a nanocrystal material selected from the group comprising Si (Silicon), Ge (Germanium), Si/Ge, Al (Aluminum), W (Tungsten) and/or TiN (Titanium nitride).

8. A memory array comprising:

a plurality of SRAM (static random access memory) memory cells, each memory cell comprising:

a first inverter comprising a first pull up transistor and a first pull down transistor, a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor, a first access transistor coupled to the first inverter, a second access transistor coupled to the second inverter, a gate stack of one transistor of each inverter comprising a polarization layer between and in contact with a gate oxide and a respective channel of each transistor that comprises the polarization layer.

9. The memory array of claim 8 , wherein each pull down transistor comprises the polarization layer.

10. The memory array of claim 8 , wherein each pull up transistor comprises the polarization layer.

11. The memory array of claim 8 , wherein the first access transistor and the second access transistor each comprises a polarization layer.

12. The memory of claim 8 , wherein the polarization layer comprises a ferroelectric material selected from the group comprising BaTiO 3 (Barium titanium oxide), PbTiO.sub.3 (Lead titanium oxide), Pb(Zr0.2Ti0.8)O 3 (Lead zirconium titanium oxide), BiFe0.95Ru0.05O 3 (Bismuth iron ruthenium oxide), HfOx (Hafnium oxide) and/or HfZrOx (Hafnium Zirconium Oxide).

13. The memory of claim 8 , wherein a gate stack of another transistor comprises a polarization layer sandwiched between a gate oxide layer and a gate metal layer.

14. The memory of claim 8 , wherein the polarization layer comprises a nanocrystal material selected from the group comprising Si (Silicon), Ge (Germanium), Si/Ge, Al (Aluminum), W (Tungsten) and/or TiN (Titanium nitride).

15. A system comprising:

a processor comprising at least one core; and

a memory array comprising a plurality of static random access memory (SRAM) memory cells, each SRAM memory cell comprising:

a first inverter comprising a first pull up transistor and a first pull down transistor, a second inverter cross coupled to the first inverter, the second inverter comprising a second pull up transistor and a second pull down transistor, a first access transistor coupled to the first inverter, a second access transistor coupled to the second inverter, a gate stack of one transistor of each inverter comprising a polarization layer between and in contact with a gate oxide and a respective channel of each transistor that comprises the polarization layer.

16. The system of claim 15 , wherein each pull down transistor comprises the polarization layer.

17. The system of claim 15 , wherein each pull up transistor comprises the polarization layer.

18. The system of claim 15 , wherein the first access transistor and the second access transistor each comprises a polarization layer.

19. The system of claim 15 , wherein the polarization layer comprises a ferroelectric material selected from the group comprising BaTiO 3 (Barium titanium oxide), PbTiO 3 (Lead titanium oxide), Pb(Zr0.2Ti0.8)O 3 (Lead zirconium titanium oxide), BiFe0.95Ru0.05O 3 (Bismuth iron ruthenium oxide), HfOx (Hafnium oxide) and/or HfZrOx (Hafnium Zirconium Oxide).

20. The system of claim 15 , wherein a gate stack of another transistor comprises a polarization layer sandwiched between a gate oxide layer and a gate metal layer of each gate stack.

21. The system of claim 15 , wherein the polarization layer comprises a nanocrystal material selected from the group comprising Si (Silicon), Ge (Germanium), Si/Ge, Al (Aluminum), W (Tungsten) and/or TiN (Titanium nitride).

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2022
From: INTEL CORPORATION
To: TAHOE RESEARCH, LTD.
Reel/Frame 061175/0176 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 8, 2020
From: MORRIS, DANIEL H.; AVCI, UYGAR E.; YOUNG, IAN A.
To: INTEL CORPORATION
Reel/Frame 053159/0015 →