IP Library Granted Patent US 11,584,696
Granted Patent B2
US 11,584,696 · App. 16/078,662 · Granted Feb 21, 2023

Copper-ceramic composite

Inventors: Kai Herbst (Erlangen, DE); Christian Muschelknautz (Darmstadt, DE)
Assignee: Heraeus Deutschland GmbH & Co. KG
C04B41/009C04B35/111C04B37/021C04B41/5127C04B41/88H01L23/15H01L23/3735C04B2235/782C04B2235/786C04B2235/788C04B2235/9607C04B2237/32C04B2237/34C04B2237/343C04B2237/36C04B2237/365C04B2237/366C04B2237/368C04B2237/40C04B2237/407C04B2237/54C04B2237/60
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Quick Facts
Patent No.
US 11,584,696
App. No.
16/078,662
Granted
Feb 21, 2023
Kind
B2
Abstract

A copper-ceramic composite: includes a ceramic substrate containing alumina and a copper or copper alloy coating on the ceramic substrate. The alumina has a mean grain shape factor R a (Al 2 O 3 ), defined as the arithmetic mean of the shape factors R of the alumina grains, of at least 0.4.

Claims (19)

1. A copper-ceramic composite comprising:

a ceramic substrate containing grains of aluminum oxide, and

a coating composed of copper or a copper alloy present on the ceramic substrate, wherein the grains of the aluminum oxide each have a maximum grain diameter d K,max , a grain diameter d K,ortho running perpendicular to d K,max , determined on half the length of d K,max , and a shape factor R K =d K,ortho /d K,max and the aluminum oxide has an average grain shape factor R a (Al 2 O 3 ), determined as arithmetic mean of the shape factors R K of the grains, of at least 0.8,

wherein the coating composed of copper or a copper alloy is applied to the ceramic substrate by a direct copper bonding (DCB) process, the DCB process comprising:

oxidizing a copper foil to form a copper oxide layer on the copper foil;

laying the copper foil with the copper oxide layer on the ceramic substrate;

heating the ceramic substrate and copper foil with the copper oxide layer to a temperature ranging from 1025° C. to 1083° C.; and

cooling the heated ceramic substrate and copper foil with the copper oxide layer to room temperature.

2. The copper-ceramic composite of claim 1 , wherein the grains of aluminum oxide range from a d min of ≥0.01 μm to a d max of ≤25 μm.

3. The copper-ceramic composites of claim 1 , wherein the ceramic substrate contains at least 65% by weight of the grains of aluminum oxide.

4. The copper-ceramic composite of claim 1 , wherein the coating composed of copper or a copper alloy at least partly has structuring to form electrical contact areas.

5. The copper-ceramic composite of claim 1 , wherein the coating composed of copper or a copper alloy has a thickness in the range of 0.2-1.2 mm over at least 70% of its area; and the ceramic substrate has a thickness in the range of 0.2-1.2 mm over at least 70% of its area.

6. A module containing at least one copper-ceramic composite according to claim 1 and one or more bond wire(s).

7. The copper-ceramic composite of claim 1 , wherein the grains of aluminum oxide range from a d min of ≥0.3 μm to a d max of ≤23 μm.

8. The copper-ceramic composite of claim 1 , wherein the grains of aluminum oxide range from a d min of ≥0.5 μm to a d max of ≤20 μm.

9. The copper-ceramic composite of claim 1 , wherein the coating composed of copper or a copper alloy has a thickness in the range of 0.2-1.2 mm over at least 70% of its area.

10. The copper-ceramic composite of claim 1 , wherein the ceramic substrate has a thickness in the range of 0.2-1.2 mm over at least 70% of its area.

11. The copper-ceramic composite of claim 1 , further comprising copper-aluminum spinels between the ceramic substrate and the coating.

12. The copper ceramic composite of claim 1 , wherein the ceramic substrate and copper foil with the copper oxide layer are heated to a temperature ranging from 1065° C. to 1083° C.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 5, 2024
From: HERAEUS DEUTSCHLAND GMBH & CO. KG
To: HERAEUS ELECTRONICS GMBH & CO. KG
Reel/Frame 068409/0258 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2018
From: HERBST, KAI; MUSCHELKNAUTZ, CHRISTIAN
To: HERAEUS DEUTSCHLAND GMBH & CO. KG
Reel/Frame 046657/0230 →