Article comprising a protective top layer based on mixed oxide of zirconium and aluminum
An article includes a substrate that is transparent, the substrate being covered on at least one of its faces, totally or partly, with a protective layer based on zirconium and aluminum mixed oxide.
1. An article comprising a substrate that is transparent, said substrate being covered on at least one of its faces, totally or partly, with a protective layer based on zirconium and aluminum mixed oxide, wherein the Al/Zr atomic ratio in the zirconium and aluminum mixed oxide is between 0.05 and 0.5, wherein a thickness of the protective layer is between 1 and 50 nm.
2. The article as claimed in claim 1 , wherein the protective layer based on zirconium and aluminum mixed oxide is the layer that is the most remote from the substrate.
3. The article as claimed in claim 1 , wherein the Al/Zr atomic ratio in the zirconium and aluminum mixed oxide is between 0.05 and 0.4.
4. The article as claimed in claim 3 , wherein the Al/Zr atomic ratio in the zirconium and aluminum mixed oxide is between 0.1 and 0.4.
5. The article as claimed in claim 4 , wherein the Al/Zr atomic ratio in the zirconium and aluminum mixed oxide is between 0.2 and 0.3.
6. The article as claimed in claim 1 , wherein the atomic proportions of aluminum and zirconium in the protective layer relative to the proportions of all the elements other than oxygen and nitrogen are greater than 50%.
7. The article as claimed in claim 1 , wherein the mass proportions of aluminum in the protective layer relative to the mass proportions of all the elements other than oxygen and nitrogen present in the protective layer are greater than 10% and less than 60%.
8. The article as claimed in claim 1 , wherein the mass proportions of zirconium in the protective layer relative to the mass proportions of all the elements other than oxygen and nitrogen present in the protective layer are greater than 40% and less than 90%.
9. The article as claimed in claim 1 , wherein a thickness of the protective layer is between 5 and 35 nm.
10. The article as claimed in claim 1 , further comprising a coating located between said protective layer and said substrate.
11. The article as claimed in claim 1 , wherein the substrate is coated with a stack of thin layers comprising at least one functional layer and said at least one protective layer based on zirconium and aluminum mixed oxide.
12. The article as claimed in claim 11 , wherein the protective layer based on zirconium and aluminum mixed oxide is located over the functional layer.
13. The article as claimed in claim 11 , wherein the stack of thin layers comprises at least one silver-based functional metal layer, at least two coatings based on dielectric materials, each coating comprising at least one dielectric layer, such that each functional metal layer is arranged between two coatings based on dielectric materials.
14. The article as claimed in claim 11 , wherein the at least one functional layer is metallic.
15. The article as claimed in claim 1 , such that the transparent substrate is:
made of glass, or
made of polymer.
16. The article as claimed in claim 15 , wherein the glass is silico-sodic-calcium glass, and wherein the polymer is polycarbonate, polymethyl methacrylate, polyethylene, polyethylene terephthalate or polyethylene naphthalate.
17. The article as claimed in claim 1 , wherein the article is heat treated.
18. The article as claimed in claim 17 , wherein the article is heat treated by annealing, toughening and/or bending.
19. A glazing for a vehicle or glazing for a building, or glazing included in the composition of a table, a counter, a cooking hob, a shower wall, a partition or a radiator, comprising an article as claimed in claim 1 .
20. A process for manufacturing an article that includes a substrate that is transparent, said substrate being covered on at least one of its faces, totally or partly, with a protective layer based on zirconium and aluminum mixed oxide, wherein the Al/Zr atomic ratio in the zirconium and aluminum mixed oxide is between 0.05 and 0.5, wherein a thickness of the protective layer is between 1 and 50 nm, the method comprising depositing said protective layer based on zirconium and aluminum mixed oxide:
(i) by magnetron cathode sputtering, or
(ii) by chemical vapor deposition using a suitable precursor based on zirconium and aluminum, or
(iii) by gas-phase pyrolysis under ambient pressure.
21. The process as claimed in claim 20 , wherein said protective layer is deposited by co-sputtering of zirconium oxide and aluminum oxide or by reactive sputtering using a target of zirconium and aluminum in the presence of O 2 , or a mixed target of zirconium and aluminum oxide.