Light guide, detector having light guide, and charged particle beam device
The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.
1. A light guide for guiding light generated from a scintillator to a photoreceiving element, comprising:
a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator; and a tilted surface for reflecting light incident from the second surface to the inside of the light guide;
a bent portion for guiding light incident from the first surface and the second surface to different directions;
an emission surface formed to a position facing the photoreceiving element;
a linear portion for guiding light to the emission surface; and
a tilted portion formed between the linear portion and the bent portion.
2. The light guide according to claim 1 , wherein the first surface is larger than the second surface.
3. The light guide according to claim 1 , wherein the tilted surface is provided with a reflection member.
4. The light guide according to claim 1 , wherein the tilted surface is formed of a plurality of surfaces in different directions or a curved surface.
5. The light guide according to claim 1 , wherein the tilted surface situated outside of the bent portion is formed such that a relative angle between the incident light and the emission light is narrower relative to the tilted surface positioned inward of the bent portion.
6. A charged particle beam device comprising a light guide having a light incident surface, an emission surface for emitting light incident from the incident surface, and a surface for guiding light incident from the incidence surface to the emission surface, wherein
the surface has a curved outer surface starting from the end of the incident surface, and
the curved outer surface has a tangential line tilted from the normal line on the incident surface to the incident surface at a contact between the curved outer surface and the incident surface, and
a scintillator containment space including the incident surface and a side wall surface having a surface direction in the direction different from the incident surface and a reflection surface for reflecting light incident from the side wall surface are formed.
7. The charged particles beam device according to claim 6 , wherein the reflection surface is in a shape of reflecting light twice or more.
8. The charged particle beam device according to claim 6 , wherein a curved surface is present to a portion of the light guide between the incident surface and the emission surface.
9. The charged particle beam device according to claim 6 , wherein the curved outer surface has a portion capable of approximating with an equation of a circle and the center of the circle is not present in a plane parallel with the incident surface.