High transmission ITO film-coated glass
The present invention provides a high transmission glass with an ITO film which is excellent in a higher transmittance and reduced reflection, produced by fewer steps at lower cost, and used as an optical switch for optical communication utilizing infrared ray. The high transmission ITO film-coated glass is used for a liquid crystal device utilizing infrared ray having a wavelength region from 1530 nm to 1570 nm as incident light. The high transmission ITO film-coated glass 10 is configured to be arranged to sandwich a liquid crystal layer, the high transmission ITO film-coated glass has an ITO film 2 formed on an inside face of the glass substrate 1 to face the liquid crystal layer when arranged with the liquid crystal layer, and the high transmission ITO film-coated glass has a SiOx film 11 (1≤x<2) formed between the ITO film 2 and the glass substrate 1.
1. A high transmission ITO film-coated glass used for a liquid crystal device utilizing infrared ray having a wavelength range from 1530 nm to 1570 nm as incident light, wherein
the high transmission ITO film-coated glass is configured to be arranged to sandwich a liquid crystal layer,
the high transmission ITO film-coated glass has an ITO film formed on an inside face of a glass substrate to face the liquid crystal layer when arranged with the liquid crystal layer, and
the high transmission ITO film-coated glass has an SiOx film (1≤x<2) formed between the ITO film and the glass substrate.
2. The high transmission ITO film-coated glass according to claim 1 , wherein
the ITO film has a film thickness of is 8 nm±3 nm, and
the SiOx film (1≤x<2) has a film thickness of 50 nm±20 nm.
3. A high transmission ITO film-coated glass used for a liquid crystal device utilizing infrared ray having a wavelength range from 1530 nm to 1570 nm as incident light, wherein
the high transmission ITO film-coated glass is configured to be arranged to sandwich a liquid crystal layer,
the high transmission ITO film-coated glass has an ITO film formed on an inside face of a glass substrate to face the liquid crystal layer when arranged with the liquid crystal layer, and
the high transmission ITO film-coated glass has an SiOx film (1≤x<2) formed on a further inside face of the ITO film to face the liquid crystal layer when arranged with the liquid crystal layer.
4. The high transmission ITO film-coated glass according to claim 3 , wherein
the ITO film has a film thickness of 8 nm±3 nm, and
the SiOx film (1≤x<2) has a film thickness of 200 nm±140 nm.
5. A high transmission ITO film-coated glass used for a liquid crystal device utilizing infrared ray having a wavelength range from 1530 nm to 1570 nm as incident light, wherein
the high transmission ITO film-coated glasses is configured to be arranged to sandwich a liquid crystal layer,
the high transmission ITO film-coated glass has an ITO film formed on an inside face of a glass substrate to face the liquid crystal layer when arranged with the liquid crystal layer, and
the high transmission ITO film-coated glass has a first SiOx film (1≤x<2) formed between the ITO film and the glass substrate, and
the high transmission ITO film-coated glass has a second SiOx film (1≤x<2) formed on an inside face of the ITO film to face the liquid crystal layer when arranged with the liquid crystal layer.
6. The high transmission ITO film-coated glass according to claim 5 , wherein
the ITO film has a film thickness of is 8 nm±3 nm, and
the SiOx film (1≤x<2) has a film thickness of 130 nm±70 nm.