Ozone gas generator and method for manufacturing ozone gas generator
An ozone gas generator includes a first electrode portion that includes a first electrode, and a second electrode portion that faces the first electrode portion, is disposed with a predetermined interval at which discharge between the first electrode portion and the second electrode portion is possible, and includes a second electrode, in which at least one of the first electrode portion and the second electrode portion includes a dielectric that is provided on a surface of the first electrode or the second electrode on sides facing each other, and at least one of the first electrode portion and the second electrode portion includes a layer that is provided on at least a portion of the surface of the first electrode or the second electrode on the sides facing each other, or the dielectric, and includes at least one of a metal or a metal compound, and the first electrode portion and the second electrode portion are configured such that accuracy of an interval between surfaces facing each other is ±3% or more and ±50% or less.
1. A method for manufacturing an ozone gas generator, comprising:
a step of forming a first electrode portion that includes a first electrode;
a step of forming a second electrode portion that includes a second electrode; and
a step of disposing the first electrode portion and the second electrode portion in which the first electrode portion and the second electrode portion face each other with an intended discharge gap Da of 300 μm or less,
a step of providing a dielectric on a surface of the first electrode or the second electrode on sides facing each other in the first electrode portion and the second electrode portion,
a step of forming a member having a height D 2 on the dielectric between the first electrode portion and the second electrode portion,
a step of providing a layer having a thickness D 3 that includes at least one of a metal or a metal compound on at least a portion of the surface of the first electrode or the second electrode on the sides facing each other, or the dielectric in the first electrode portion and the second electrode portion, wherein
the member is formed and the layer is provided such that the height D 2 and the thickness D 3 cause an actual discharge gap D 1 between the first electrode portion and the second electrode portion to vary by x % from the intended discharge gap Da, wherein, 10 < x < 50, and (1−x/100)×Da < D 1 < (1+x/100)×Da.
2. The method of claim 1 , wherein
the varying of the actual discharge gap D 1 between the surfaces facing each other is due to at least one of:
a first variation in a height of the member; or
a second variation in a thickness of the layer.
3. The method according to claim 1 , wherein
the first electrode portion and the second electrode portion are configured such that the accuracy of the intended discharge gap D 1 between the surfaces facing each other in 30% or more of a discharging effective area is x %.
4. The method according to claim 1 , wherein
a plurality of discharge cells, each of which is formed of the first electrode portion and the second electrode portion are provided, and
the first electrode portion and the second electrode portion of each of the plurality of discharge cells are configured such that the accuracy of the actual discharge gap D 1 between the surfaces facing each other is x %.
5. The method according to claim 1 , wherein
the first electrode portion and the second electrode portion of each of the plurality of discharge cells are configured such that the accuracy of the actual discharge gap D 1 between the surfaces facing each other is x %, with respect to the intended discharge gap Da.
6. The method according to claim 1 , wherein
the first electrode portion and the second electrode portion are configured such that the accuracy of the actual discharge gap D 1 to an average of the discharge gaps between the surfaces facing each other in the discharging effective area is x %.
7. The method according to claim 1 , wherein
the first electrode portion and the second electrode portion are configured such that the accuracy of the actual discharge gap D 1 between the surfaces facing each other is x %, with respect to the intended discharge gap Da of 300 μm or less.
8. The method according to claim 1 , wherein
the first electrode portion and the second electrode portion are configured such that the accuracy of the actual discharge gap D 1 between the surfaces facing each other is y % with respect to the intended discharge gap Da of 300 μm or less, wherein, 10 < y < 30, and (1−y/100)×Da < D 1 < (1+y/100)×Da.
9. The method according to claim 1 , wherein
the layer that includes at least one of the metal or the metal compound is a layer including a metal compound, and
the metal compound includes at least one metal of titanium, niobium, and tungsten.
10. The method according to claim 1 , wherein
the member is formed such that the height D 2 is approximately one half of the intended discharge gap Da.